Process Limitations in Microassembling using Holographic Optical Tweezers

被引:2
作者
Ghadiri, R. [1 ]
Guo, Q. [1 ]
Yeoh, I. [1 ]
Esen, C. [1 ]
Ostendorf, A. [1 ]
机构
[1] Ruhr Univ Bochum, D-44801 Bochum, Germany
来源
LASER-BASED MICRO- AND NANOPACKAGING AND ASSEMBLY VI | 2012年 / 8244卷
关键词
microassembling; micromanipulation; microfabrication; micromachining; optical tweezers; optical trapping; holographic optical tweezers; TRAP;
D O I
10.1117/12.906679
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Microassembling with holographic optical tweezers (HOT) is a flexible manufacturing technology for the precise fabrication of complex microstructures. In contrast to classical direct writing techniques, here, microparticles are transported within a fluid to appropriate positions, where they are finally bound. Therefore, optical forces act against the inner friction of the fluid. This effect limits the microassembling process in the meaning of process speed. In this work we investigate these limitations depending on the applied laser power and particle size. Additionally, different to conventional optical tweezers, HOTs use spatial light modulators (SLM) to control the laser beam and the object's position. This is performed at discrete step sizes caused by successively imaging respective kinoforms on the SLM at specific refresh rates. An optimization of the step size and the applied update rate are crucial to reach maximum velocities in particle movement. Therefore, the performance of dynamic particle manipulation is investigated in individual experiments. Stable manipulation velocities of up to 114 mu m/s have been reported in our work using 6 mu m polystyrene particles and an applied laser power of 445 mW.
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页数:7
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