Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition

被引：46

作者：

Ohkubo, I ^{[1
]}

Christen, HM ^{[1
]}

Khalifah, P ^{[1
]}

Sathyamurthy, S ^{[1
]}

Zhai, HY ^{[1
]}

Rouleau, CM ^{[1
]}

Mandrus, DG ^{[1
]}

Lowndes, DH ^{[1
]}

机构：

[1] Oak Ridge Natl Lab, Condensed Matter Sci Div, Oak Ridge, TN 37831 USA

来源：

APPLIED SURFACE SCIENCE | 2004年 / 223卷 / 1-3期

关键词：

composition spread; transition metal; oxides; PLD; epitaxial thin films;

D O I：

10.1016/S0169-4332(03)00914-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have designed an improved pulsed-laser deposition-continuous composition-spread (PLD-CCS) system that overcomes the difficulties associated with earlier related techniques. Our new PLD-CCS system is based on a precisely controlled synchronization between the laser firing, target exchange, and substrate translation/rotation, and offers more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range, and the resulting samples are sufficiently large to allow characterization by conventional techniques. We fabricated binary alloy composition-spread films composed of SrRuO3 and CaRuO3. Alternating ablation from two different ceramic targets leads to in situ alloy formation, and the value of x in SrxCax-1RuO3 can be changed linearly from 0 to 1 (or over any arbitrarily smaller range) along one direction of the substrate. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：35 / 38

页数：4

共 50 条

[21] Pulsed laser deposition and characterization of cellulase thin films [J].

Cicco, N. ;

Morone, A. ;

Verrastro, M. ;

Viggiano, V. .

APPLIED SURFACE SCIENCE, 2013, 278 :223-225

[22] Pulsed laser deposition of thin films for optics applications [J].

De Giorgi, ML ;

Fernández, M ;

Leggieri, G ;

Luches, A ;

Martino, M ;

Zocco, A .

ROMOPTO 2000: SIXTH CONFERENCE ON OPTICS, 2000, 4430 :186-195

[23] Pulsed laser deposition of multicomponent metal and oxide films [J].

Ozegowski, M ;

Meteva, K ;

Metev, S ;

Sepold, G .

APPLIED SURFACE SCIENCE, 1999, 138 :68-74

[24] Observation of growth morphology in pulsed-laser deposited barium ferrite thin films [J].

Zhang, XY ;

Ong, CK ;

Xu, SY ;

Fang, HC .

APPLIED SURFACE SCIENCE, 1999, 143 (1-4) :323-327

[25] Study of structural phase transition in nanocrystalline Cobalt Oxide thin films by pulsed laser deposition [J].

Salih, Ammar T. ;

Gbashi, Kadhim R. ;

Najim, Aus A. ;

Muhi, Malek A. H. .

MATERIALS RESEARCH EXPRESS, 2019, 6 (07)

[26] Waveguiding properties of pulsed-laser deposition Ca4GdO(BO3)3 thin films [J].

Essahlaoui, A ;

Boudrioua, A ;

Loulergue, JC ;

Chety, R ;

Millon, E ;

Perriere, J .

OPTICAL MATERIALS, 2002, 19 (04) :389-394

[27] Titanium oxide thin films produced by pulsed laser deposition [J].

Sima, C. ;

Grigoriu, C. ;

Viespe, C. ;

Pasuk, I. ;

Matei, E. .

JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2009, 11 (06) :826-830

[28] Reactive pulsed laser deposition of iridium oxide thin films [J].

El Khakani, MA ;

Chaker, M .

THIN SOLID FILMS, 1998, 335 (1-2) :6-12

[29] Synthesis and characterization of graphene thin films by pulsed laser deposition [J].

Wang, Jin ;

Yu, Jian ;

Xiong, Zhengwei ;

Yin, Hongbu ;

Wang, Xuemin ;

Cao, Linhong ;

Wu, Weidong .

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2015, 35 (08) :1023-1027

[30] Pulsed laser deposition of wide bandgap semiconductor thin films [J].

O'Mahony, D ;

de Posada, E ;

Lunney, JG ;

Mosnier, JP ;

McGlynn, E .

OPTO-IRELAND 2002: OPTICS AND PHOTONICS TECHNOLOGIES AND APPLICATIONS, PTS 1 AND 2, 2003, 4876 :508-516

← 1 2 3 4 5 →