Hydrogenated amorphous carbon films with different nanostructure: A comparative study

被引：12

作者：

Gao, Kaixiong ^{[1
,3
]}

Wang, Yongfu ^{[1
]}

Wei, Xiaoli ^{[1
,2
]}

Qiang, Li ^{[1
]}

Zhang, Bin ^{[1
]}

Zhang, Junyan ^{[1
]}

机构：

[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Gansu, Peoples R China

[2] Lanzhou Univ Arts & Sci, Sch Chem Engn, Lanzhou 730000, Gansu, Peoples R China

[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

CHEMICAL PHYSICS LETTERS | 2019年 / 715卷

基金：

中国国家自然科学基金;

关键词：

Nanostructure; Hydrogenated amorphous carbon film; a-C:H; FTIR Raman; DIAMOND-LIKE CARBON; RAMAN-SPECTRA; STRESS;

D O I：

10.1016/j.cplett.2018.11.028

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The introduction of curved graphite fragments into hydrogenated amorphous carbon films has been studied, and their contents are always estimated by TEM and Raman. Here, we detailedly discussed the advantage and disadvantage of TEM and Raman fit method. Combined with FTIR results, we claified the chemical structures of the structural films and the bonded sites of doped H. The curved graphite structures included hexahydric carbon rings, and amorphous carbon (a-C) structures had rich olefinic groups and H. Finally, the differences among TEM, Raman, FTIR and H analysis in terms of the contents of curved graphite fragments were discussed.

引用

页码：330 / 334

页数：5

共 50 条

[31] Nanostructure of hydrogenated amorphous silicon (a-Si:H) films studied by nuclear magnetic resonance
Furman, Gregory
Sokolovsky, Vladimir
Panich, Alexander
Xia, Yang
JOURNAL OF MAGNETIC RESONANCE, 2023, 350
[32] Photoconductivity and characterization of nitrogen incorporated hydrogenated amorphous carbon thin films
Dwivedi, Neeraj
Kumar, Sushil
Carey, J. D.
Malik, Hitendra K.
Govind
JOURNAL OF APPLIED PHYSICS, 2012, 112 (11)
[33] Thermal decomposition and structural variation by heating on hydrogenated amorphous carbon films
Akasaka, Hiroki
Tunme, Sarayut
Rittihong, Ukit
Tomidokoro, Masashi
Euaruksakul, Chanan
Norizuki, Souta
Supruangnet, Ratchadaporn
Nakajima, Hideki
Hirata, Yuki
Ohtake, Naoto
DIAMOND AND RELATED MATERIALS, 2020, 101
[34] Effect of atomic hydrogen exposure on hydrogenated amorphous carbon thin films
Haruyama, Yuichi
Morimoto, Daiki
Heya, Akira
Sumitomo, Koji
Ito, Seigo
Yokota, Kumiko
Tagawa, Masahito
JAPANESE JOURNAL OF APPLIED PHYSICS, 2021, 60 (12)
[35] Stability of hydrogenated amorphous carbon thin films for application in electronic devices
Alotaibi, Sattam
Manjunatha, Krishna Nama
Paul, Shashi
DIAMOND AND RELATED MATERIALS, 2018, 90 : 172 - 180
[36] Dielectric response and structure of amorphous hydrogenated carbon films with nitrogen admixture
Zajickova, Lenka
Franta, Daniel
Necas, David
Bursikova, Vilma
Muresan, Mihai
Perina, Vratislav
Cobet, Christoph
THIN SOLID FILMS, 2011, 519 (13) : 4299 - 4308
[37] The effect of nitriding on the humidity sensing properties of hydrogenated amorphous carbon films
Frattini, Giuliano
Torres, Sindry
Silva, Leonel, I
Repetto, Carlos E.
Gomez, Bernardo
Dobry, Ariel
PHYSICA SCRIPTA, 2021, 96 (05)
[38] Electrodeposition and characterization of Pd nanoparticles doped amorphous hydrogenated carbon films
Yu, Yuanlie
Zhang, Junyan
SOLID STATE SCIENCES, 2009, 11 (11) : 1929 - 1932
[39] The energy influx during plasma deposition of amorphous hydrogenated carbon films
Rohde, D
Pecher, R
Kersten, H
Jacob, W
Hippler, R
SURFACE & COATINGS TECHNOLOGY, 2002, 149 (2-3) : 206 - 216
[40] Thermally induced evolution of hydrogenated amorphous carbon
Mangolini, Filippo
Rose, Franck
Hilbert, James
Carpick, Robert W.
APPLIED PHYSICS LETTERS, 2013, 103 (16)

← 1 2 3 4 5 →