Hydrogenated amorphous carbon films with different nanostructure: A comparative study

被引：12

作者：

Gao, Kaixiong ^{[1
,3
]}

Wang, Yongfu ^{[1
]}

Wei, Xiaoli ^{[1
,2
]}

Qiang, Li ^{[1
]}

Zhang, Bin ^{[1
]}

Zhang, Junyan ^{[1
]}

机构：

[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Gansu, Peoples R China

[2] Lanzhou Univ Arts & Sci, Sch Chem Engn, Lanzhou 730000, Gansu, Peoples R China

[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

CHEMICAL PHYSICS LETTERS | 2019年 / 715卷

基金：

中国国家自然科学基金;

关键词：

Nanostructure; Hydrogenated amorphous carbon film; a-C:H; FTIR Raman; DIAMOND-LIKE CARBON; RAMAN-SPECTRA; STRESS;

D O I：

10.1016/j.cplett.2018.11.028

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The introduction of curved graphite fragments into hydrogenated amorphous carbon films has been studied, and their contents are always estimated by TEM and Raman. Here, we detailedly discussed the advantage and disadvantage of TEM and Raman fit method. Combined with FTIR results, we claified the chemical structures of the structural films and the bonded sites of doped H. The curved graphite structures included hexahydric carbon rings, and amorphous carbon (a-C) structures had rich olefinic groups and H. Finally, the differences among TEM, Raman, FTIR and H analysis in terms of the contents of curved graphite fragments were discussed.

引用

页码：330 / 334

页数：5

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