Measurement uncertainty of piezoresistive beam-type humidity sensors

被引：0

作者：

Hoa, PLP ^{[1
]}

Suchaneck, G ^{[1
]}

Gerlach, G ^{[1
]}

机构：

[1] Dresden Univ Technol, Inst Solid State Elect, D-01062 Dresden, Germany

来源：

26TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY, CONFERENCE PROCEEDINGS: INTEGRATED MANAGEMENT OF ELECTRONIC MATERIALS PRODUCTION | 2003年

关键词：

D O I：

10.1109/ISSE.2003.1260562

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, the reliability and accuracy of a sensor design which exploits the volumetric changes of polymeric films due to the uptake of water vapor for humidity measurement is investigated. In this case, the humidity sensing element is a thin polymer film deposited and bonded to the surface of four cantilever beams that are bulk micromachined from the surrounding silicon substrate. For this purpose, the performance of sensors as a function of climatic conditions was experimentally studied. The main results showed a good repeatability of all sensors, positive temperature coefficients of offset voltage, and negative temperature coefficients of humidity sensitivity. The reliability and stability of the beam-type sensor design is compared with bimorph humidity sensors which use the similar piezoresistive readout.

引用

页码：408 / 411

页数：4

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