Novel confocal X-ray fluorescence (XRF) spectrometer was designed and constructed for 3D analysis of elementary composition in the surface layer of spatially extended objects having unlimited chemical composition and geometrical shape. The main elements of the XRF device were mounted on a moving frame of a commercial 3D printer. The XRF unit consists of a silicon drift detector and a low-power transmission-type X-ray tube. Both the excitation and secondary X-ray beams were formed and regulated by simple collimator systems in order to create a macro confocal measuring setup. The spatial accuracy of the mechanical stages of the 3D printer achieved was less than 5 m at 100-m step-size. The diameter of the focal spot of the confocal measuring arrangement was between 1.5 and 2.0 mm. The alignment of the excitation and secondary X-ray beams and the selection of the measuring spot on the sample surface were ensured by two laser beams and a digital microscope for visualization of the irradiated spot. The elements of the optical system together with the XRF spectrometer were mounted on the horizontal arm of the 3D printer, which mechanical design is capable of synchronized moving the full spectroscopic device within vertical directions. Analytical capability and the 3D spatial resolution of the confocal spectrometer were determined. Copyright (C) 2017 John Wiley & Sons, Ltd.
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Chinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R China
Univ Chinese Acad Sci, Sch Phys Sci, Beijing 100049, Peoples R ChinaChinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R China
Li Shun
Zhao Bin-hao
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Xinjiang Univ, Sch Phys & Technol, Urumqi 830016, Peoples R ChinaChinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R China
Zhao Bin-hao
Liu Chen
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Chinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R ChinaChinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R China
Liu Chen
Wang Jia-ou
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Chinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R ChinaChinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R China
Wang Jia-ou
Qian Hai-jie
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Chinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R ChinaChinese Acad Sci, Inst High Energy Phys, Beijing 100019, Peoples R China