Investigations of AlGaN/GaN field-effect transistor structures by photoreflectance spectroscopy

被引:6
作者
Misiewicz, J
Kudrawiec, R
Syperek, M
Paszkiewicz, R
Paszkiewicz, B
Tlaczala, M
机构
[1] Wroclaw Univ Technol, Inst Phys, PL-50370 Wroclaw, Poland
[2] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland
关键词
interface; GaN; AlGaN/GaN; photoreflectance; HFET;
D O I
10.1016/j.mejo.2005.02.042
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Undoped AlGaN/GaN heterostructures with different content of AlGaN layer have been investigated by photoreflectance (PR) spectroscopy. PR resonances associated with the absorption in both GaN and AlGaN layers have been observed. The observed AlGaN-related transition has been identified as a hand-to-hand absorption in the layer being in under a strong built-in electric field. The electric field has been determined from the period of Franz-Keldysh Oscillations (FKOs) typical of layers being in a built-in electric field. It has been shown that the internal electric field in AlGaN layer increases by 21% (from similar to 240 to 290 kV/cm) with the rise of At mole fraction from 20 to 27%. This phenomenon has been attributed to an increase in the surface potential for AlGaN layer due to the rise of Al mole fraction. In addition, PR signal related to GaN has been analyzed. It has been shown that the GaN-related part of PR spectrum exhibits FKOs, besides, sharp PR features which could be associated with an excitonic absorption far to the AlGaN/GaN, i.e. in the part of GaN layer being in weak internal electric field. The GaN-related FKOs have been attributed the hand-to-hand absorption in the GaN layer being in strong internal electric field, i.e. in the part of GaN layer close to the AlGaN/GaN interface. It has been determined that this field is in the range of 220-230 kV/cm. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:442 / 445
页数:4
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