Optical sensor based on fractal cantor multilayer structures made of porous silicon

被引：0

作者：

Mo, Jia-qing ^{[1
]}

Lv, Xiao-yi ^{[1
]}

Jia, Zhen-hong

Zhong, Fu-ru ^{[2
]}

Li, Jiang-wei ^{[3
]}

Zhang, Fu-chun ^{[3
]}

机构：

[1] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian 710049, Peoples R China

[2] Xinjiang Univ, Coll Chem Che Engn, Urumqi 830046, Peoples R China

[3] Xinjiang Univ, Key Lab Xinjiang Biological Res, Urumqi 830046, Peoples R China

来源：

ADVANCED SENSOR SYSTEMS AND APPLICATIONS IV | 2010年 / 7853卷

关键词：

porous silicon; sensor; fractal Cantor structure; multilayer; SENSITIVITY;

D O I：

10.1117/12.869958

中图分类号：

TP7 [遥感技术];

学科分类号：

081102 ; 0816 ; 081602 ; 083002 ; 1404 ;

摘要：

We have designed and characterized a novel fractal Cantor multilayer porous silicon photonic crystal with a defect embedded in its middle as an optical sensor for sensing of various chemical and biological species. Compared with the common periodic structure one (such as Bragg) and some aperiodic structure (such as Thue-morse), it is more sensitive because of the lower number of interfaces. This research lays the foundation for design all-silicon sensor for biochemical sensing and can also be good applied in excellent filter.

引用

页数：6

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