Design and Modeling of a high-speed AFM-scanner

被引：312

作者：

Schitter, Georg ^{[1
]}

Astroem, Karl J.

DeMartini, Barry E.

Thurner, Philipp J.

Turner, Kimberly L.

Hansma, Paul K.

机构：

[1] Delft Univ Technol, Delft Ctr Syst & Control, NL-2628 CD Delft, Netherlands

[2] Univ Calif Santa Barbara, Dept Mech & Environm Engn, Santa Barbara, CA 93106 USA

来源：

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY | 2007年 / 15卷 / 05期

基金：

美国国家科学基金会; 美国国家卫生研究院; 美国国家航空航天局;

关键词：

atomic force microscopy; fast scanning; mechatronics; nanotechnology; precision positioning; real time imaging;

D O I：

10.1109/TCST.2007.902953

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 pro in the X- and Y-directions and 4.3 mu m in the vertical direction. The lowest resonance frequency of this scanner is above 12 kHz. This paper is focused on the vertical direction of the, scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (PI)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.

引用

页码：906 / 915

页数：10

共 37 条

[1] Modeling piezoelectric actuators [J].

Adriaens, HJMTA ;

de Koning, WL ;

Banning, R .

IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2000, 5 (04) :331-341

[2] AN ATOMIC-RESOLUTION ATOMIC-FORCE MICROSCOPE IMPLEMENTED USING AN OPTICAL-LEVER [J].

ALEXANDER, S ;

HELLEMANS, L ;

MARTI, O ;

SCHNEIR, J ;

ELINGS, V ;

HANSMA, PK ;

LONGMIRE, M ;

GURLEY, J .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) :164-167

[3] A high-speed atomic force microscope for studying biological macromolecules [J].

Ando, T ;

Kodera, N ;

Takai, E ;

Maruyama, D ;

Saito, K ;

Toda, A .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2001, 98 (22) :12468-12472

[4] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[5] Vibration compensation for high speed scanning tunneling microscopy [J].

Croft, D ;

Devasia, S .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (12) :4600-4605

[6] Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application [J].

Croft, D ;

Shed, G ;

Devasia, S .

JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 2001, 123 (01) :35-43

[7]

El Rifai K, 2004, P AMER CONTR CONF, P3128

[8] Millipede -: A MEMS-based scanning-probe data-storage system [J].

Eleftheriou, E ;

Antonakopoulos, T ;

Binnig, GK ;

Cherubini, G ;

Despont, M ;

Dholakia, A ;

Dürig, U ;

Lantz, MA ;

Pozidis, H ;

Rothuizen, HE ;

Vettiger, P .

IEEE TRANSACTIONS ON MAGNETICS, 2003, 39 (02) :938-945

[9] Data acquisition system for high speed atomic force microscopy [J].

Fantner, GE ;

Hegarty, P ;

Kindt, JH ;

Schitter, G ;

Cidade, GAG ;

Hansma, PK .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (02) :026118-1

[10] Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners [J].

Fleming, AJ ;

Moheimani, SOR .

IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2006, 14 (01) :33-44

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