Rapid thermal processing chamber for in-situ x-ray diffraction

被引：16

作者：

Ahmad, Md Imteyaz ^{[1
]}

Van Campen, Douglas G. ^{[1
]}

Fields, Jeremy D. ^{[2
]}

Yu, Jiafan ^{[1
]}

Pool, Vanessa L. ^{[1
]}

Parilla, Philip A. ^{[2
]}

Ginley, David S. ^{[2
]}

Van Hest, Maikel F. A. M. ^{[1
]}

Toney, Michael F. ^{[1
]}

机构：

[1] SLAC Natl Accelerator Lab, SSRL, Menlo Pk, CA 94025 USA

[2] Natl Renewable Energy Lab, Golden, CO 80401 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2015年 / 86卷 / 01期

关键词：

CONTACTS;

D O I：

10.1063/1.4904848

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Rapid thermal processing (RTP) is widely used for processing a variety of materials, including electronics and photovoltaics. Presently, optimization of RTP is done primarily based on ex-situ studies. As a consequence, the precise reaction pathways and phase progression during the RTP remain unclear. More awareness of the reaction pathways would better enable process optimization and foster increased adoption of RTP, which offers numerous advantages for synthesis of a broad range of materials systems. To achieve this, we have designed and developed a RTP instrument that enables real-time collection of X-ray diffraction data with intervals as short as 100 ms, while heating with ramp rates up to 100 degrees Cs-1, and with a maximum operating temperature of 1200 degrees C. The system is portable and can be installed on a synchrotron beamline. The unique capabilities of this instrument are demonstrated with in-situ characterization of a Bi2O3-SiO2 glass frit obtained during heating with ramp rates 5 degrees Cs-1 and 100 degrees Cs-1, revealing numerous phase changes. (C) 2015 AIP Publishing LLC.

引用

页数：7