Investigation of properties of electric arc ion deposited TiN coating on Al2O3-based ceramic composite

被引:10
作者
Zhang, JH [1 ]
Zhang, QJ
Wu, CL
Qin, Y
Lee, TC
机构
[1] Shandong Univ, Dept Mfg Engn, Coll Mech Engn, Jinan 250061, Peoples R China
[2] Hong Kong Polytech Univ, Dept Syst & Ind Engn, Hong Kong, Peoples R China
基金
中国国家自然科学基金;
关键词
electric arc ion deposition; coating; interface; ceramic composite;
D O I
10.1163/156856103321645202
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Electric arc ion deposition technique was adopted to deposit TiN coating on Al2O3-based ceramic composite. Scanning electron microscopy and secondary ion mass spectrometry were used to analyze the microstructure, phase constitution, and quality of the TiN coating and the interface. Surface roughness and micro-hardness of the TiN coating were measured to evaluate its quality. Flexural strength of ceramic materials is dependent on both their inherent resistance to fracture and the presence of defects, thus it was used to investigate the effect of electric arc ion deposition technique on the surface modification of Al2O3-based ceramic composite. Experimental results show that the higher the deposition bias voltage, the better the coating quality. The TiN coating is homogeneous, with a uniform surface, and free of defects when the deposition bias voltage is 300 V. The TiN coating strongly adheres to the Al2O3-based ceramic composite, and the observed elemental inter-face diffusion strengthens the interface bonding.
引用
收藏
页码:861 / 869
页数:9
相关论文
共 9 条
[1]   Mechanical properties and oxidation resistance of nanocomposite TiN-SiNx physical-vapor-deposited thin films [J].
Diserens, M ;
Patscheider, J ;
Lévy, F .
SURFACE & COATINGS TECHNOLOGY, 1999, 120 :158-165
[2]  
GONG XM, 1993, MAT MECH ENG, V16, P16
[3]   SYNTHESIS OF MONODISPERSED SPHERICAL BETA-SILICON CARBIDE POWDER BY A SOL-GEL PROCESS [J].
HATAKEYAMA, F ;
KANZAKI, S .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (07) :2107-2110
[4]   THE DEPENDENCE OF HARDNESS AND CORROSION PROTECTION POWER OF ION-BEAM-ASSISTED DEPOSITION TIN COATINGS ON THE ION-BEAM IMPACT ANGLE [J].
HUBLER, R ;
ALBERTS, L ;
WOLF, GK .
SURFACE & COATINGS TECHNOLOGY, 1993, 60 (1-3) :549-555
[5]   MACROPARTICLE-FREE TIN FILMS PREPARED BY ARC ION-PLATING PROCESS [J].
KANG, GH ;
UCHIDA, H ;
KOH, ES .
SURFACE & COATINGS TECHNOLOGY, 1994, 68 :141-145
[6]  
LI YY, 1998, J METAL HEAT TREATME, V19, P14
[7]   Structure of TiN coatings [J].
Valvoda, V .
SURFACE & COATINGS TECHNOLOGY, 1996, 80 (1-2) :61-65
[8]  
WEN LS, 1986, J VAC SCI TECHNOL, V14, P2682
[9]  
WITOLD K, 1990, LUBR ENG, V46, P645