Aqueous Solution-Processed Nanometer-Thin Crystalline Indium Ytterbium Oxide Thin-Film Transistors

被引:5
作者
Xu, Wangying [1 ]
Xu, Chuyu [1 ]
Hong, Liping [1 ]
Xu, Fang [2 ,3 ]
Zhao, Chun [4 ]
Zhang, Yu [5 ]
Fang, Ming [1 ]
Han, Shun [1 ]
Cao, Peijiang [1 ]
Lu, Youming [1 ]
Liu, Wenjun [1 ]
Zhu, Deliang [1 ]
机构
[1] Shenzhen Univ, Coll Mat Sci & Engn, Guangdong Res Ctr Interfacial Engn Funct Mat, Shenzhen Key Lab Special Funct Mat, Shenzhen 518000, Peoples R China
[2] Shenzhen Technol Univ, Ctr Adv Mat Diagnost Technol, Shenzhen Key Lab Ultraintense Laser & Adv Mat Tec, Shenzhen 518118, Peoples R China
[3] Shenzhen Technol Univ, Coll Engn Phys, Shenzhen 518118, Peoples R China
[4] Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou 215123, Peoples R China
[5] Shenzhen Polytech, Dept Elect & Commun Engn, Shenzhen 518055, Peoples R China
基金
中国国家自然科学基金;
关键词
aqueous solution-processed; indium ytterbium oxide; ultra-thin; thin-film transistors; bias stress stability; LOW-TEMPERATURE;
D O I
10.3390/nano12071216
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We demonstrate the growth of ultra-thin (similar to 5 nm) indium ytterbium oxide (In-Yb-O) thin film using a simple vacuum-free aqueous solution approach for the first time. The influences of Yb addition on the microstructural, chemical, optical, and electrical properties of In2O3 are well investigated. The analyses indicate that Yb dopant could suppress oxygen vacancy defects effectively owing to the lower standard electrode potential, lower electronegativity, and stronger metal-oxide bond strength than that of In. The optimized In-Yb-O thin-film transistors (TFTs) exhibit excellent electrical performance (mobility of 8 cm(2)/Vs and on/off ratio of similar to 10(8)) and enhanced stability. The triumph of In-Yb-O TFTs is owing to the high quality In2O3 matrix, the remarkable suppressor of Yb, and the nanometer-thin and atomically smooth nature (RMS: similar to 0.26 nm) of channel layer. Therefore, the eco-friendly water-induced ultra-thin In-Yb-O channel provides an excellent opportunity for future large-scale and cost-effective electronic applications.
引用
收藏
页数:11
相关论文
共 29 条
[1]   Polymer-Assisted Deposition of Gallium Oxide for Thin-Film Transistor Applications [J].
Chen, Lin ;
Xu, Wangying ;
Liu, Wenjun ;
Han, Shun ;
Cao, Peijiang ;
Fang, Ming ;
Zhu, Deliang ;
Lu, Youming .
ACS APPLIED MATERIALS & INTERFACES, 2019, 11 (32) :29078-29085
[2]   Solution-processed metal-oxide thin-film transistors: a review of recent developments [J].
Chen, Rongsheng ;
Lan, Linfeng .
NANOTECHNOLOGY, 2019, 30 (31)
[3]   Carrier-suppressing effect of scandium in InZnO systems for solution-processed thin film transistors [J].
Choi, Yuri ;
Kim, Gun Hee ;
Jeong, Woong Hee ;
Bae, Jung Hyeon ;
Kim, Hyun Jae ;
Hong, Jae-Min ;
Yu, Jae-Woong .
APPLIED PHYSICS LETTERS, 2010, 97 (16)
[4]   Unique chemistries of metal-nitrate precursors to form metal-oxide thin films from solution: materials for electronic and energy applications [J].
Cochran, Elizabeth A. ;
Woods, Keenan N. ;
Johnson, Darren W. ;
Page, Catherine J. ;
Boettcher, Shannon W. .
JOURNAL OF MATERIALS CHEMISTRY A, 2019, 7 (42) :24124-24149
[5]   Oxide Semiconductor Thin-Film Transistors: A Review of Recent Advances [J].
Fortunato, E. ;
Barquinha, P. ;
Martins, R. .
ADVANCED MATERIALS, 2012, 24 (22) :2945-2986
[6]   Oxygen "Getter" Effects on Microstructure and Carrier Transport in Low Temperature Combustion-Processed a-InXZnO (X = Ga, Sc, Y, La) Transistors [J].
Hennek, Jonathan W. ;
Smith, Jeremy ;
Yan, Aiming ;
Kim, Myung-Gil ;
Zhao, Wei ;
Dravid, Vinayak P. ;
Facchetti, Antonio ;
Marks, Tobin J. .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2013, 135 (29) :10729-10741
[7]   High performance indium dysprosium oxide thin-film transistors grown from aqueous solution [J].
Hong, Liping ;
Xu, Wangying ;
Liu, Wenjun ;
Han, Shun ;
Cao, Peijiang ;
Fang, Ming ;
Zhu, Deliang ;
Lu, Youming .
APPLIED SURFACE SCIENCE, 2020, 504
[8]   An 'aqueous route' for the fabrication of low-temperature-processable oxide flexible transparent thin-film transistors on plastic substrates [J].
Hwang, Young Hwan ;
Seo, Jin-Suk ;
Yun, Je Moon ;
Park, HyungJin ;
Yang, Shinhyuk ;
Park, Sang-Hee Ko ;
Bae, Byeong-Soo .
NPG ASIA MATERIALS, 2013, 5 :e45-e45
[9]   Stability Improvement of In-Sn-Ga-O Thin-Film Transistors at Low Annealing Temperatures [J].
Jeong, Hyun-Jun ;
Ok, Kyung-Chul ;
Park, Jozeph ;
Lim, Junhyung ;
Cho, Johann ;
Park, Jin-Seong .
IEEE ELECTRON DEVICE LETTERS, 2015, 36 (11) :1160-1162
[10]   Evolution of Defect Structures and Deep Subgap States during Annealing of Amorphous In-Ga-Zn Oxide for Thin-Film Transistors [J].
Jia, Junjun ;
Suko, Ayaka ;
Shigesato, Yuzo ;
Okajima, Toshihiro ;
Inoue, Keiko ;
Hosomi, Hiroyuki .
PHYSICAL REVIEW APPLIED, 2018, 9 (01)