[1] Fudan Univ, Sch Microelect, Shanghai Inst Intelligent Elect & Syst, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
[3] Fudan Univ, Sch Informat Sci & Technol, Shanghai 200433, Peoples R China
[4] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, State Key Lab Met Matrix Composites, Shanghai 200240, Peoples R China
[5] Fudan Univ, Dept Opt Sci & Engn, Key Lab Micro & Nano Photon Struct, Shanghai 200433, Peoples R China