The properties of cadmium tin oxide thin-film compounds prepared by linear combinatorial synthesis

被引：42

作者：

Li, XA ^{[1
]}

Gessert, TA ^{[1
]}

Coutts, T ^{[1
]}

机构：

[1] Natl Renewable Energy Lab, Golden, CO 80401 USA

来源：

APPLIED SURFACE SCIENCE | 2004年 / 223卷 / 1-3期

关键词：

thin film; transparent conducting oxides; cadmium tin oxide; MOCVD; linear combinatorial synthesis; material properties;

D O I：

10.1016/S0169-4332(03)00909-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

SnO2 and CdO films with high electrical and optical quality have been produced by using low-pressure metal-organic chemical vapor deposition. Based on the knowledge gained from binary oxide formation, linear combinatorial synthesis is used to study the ternary oxide (Cd-Sn-O) compound. Compositional, structural, electrical, and optical properties of the films are found to vary along the reactant gas flow direction. The crystal structure indicates that the CdO-like films are formed near the location of gas injection and SnO2-like films near the end of the deposition zone. As composition and structure change, the carrier concentration varies around 10(20) cm(-3), and the mobility increases from less than 1 to similar to60 cm(2) V-1 s(-1). The optical bandgap of the films also increases from similar to2.75 to 3.65 eV as composition moves from CdO-Iike films to SnO2-like films. (C) 2003 Published by Elsevier B.V.

引用

页码：138 / 143

页数：6

共 19 条

[11] Spray Deposition of Cadmium Stannate Films [J].