A laser beam homogenizer with a variable output cross section

被引：2

作者：

Murra, D ^{[1
]}

Di Lazzaro, P ^{[1
]}

Bollanti, S ^{[1
]}

Felici, G ^{[1
]}

机构：

[1] ENEA, I-00044 Frascati, Italy

来源：

ALT'02 INTERNATIONAL CONFERENCE ON ADVANCED LASER TECHNOLOGIES | 2003年 / 5147卷

关键词：

beam control and diagnostic; beam shaping; light homogenizer; excimer laser;

D O I：

10.1117/12.537572

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a novel optical system (patent pending), which makes homogeneous the spatial energy distribution of a light beam, independently of the local intensity fluctuations strength. It can also change the spot dimensions of the homogenized beam over a large range of values without replacement of any optical element and without changing the length of the radiation path.

引用

页码：178 / 184

页数：7

共 8 条

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ALT'99 INTERNATIONAL CONFERENCE ON ADVANCED LASER TECHNOLOGIES, 2000, 4070 :345-350

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