Optical properties of KTaxNb1-xO3 waveguides formed by carbon and proton implantation

被引：5
作者：
Wang, Liang-Ling [1 ]
Wang, Xue-Lin
Chen, Feng
Wang, Ke-Ming
Lu, Fei
Zhang, Huai-Jin
Wang, Xu-Ping
Ma, Hong-Ji
机构：
[1] Shandong Univ, Sch Phys & Microelect, Jinan 250100, Shandong, Peoples R China
[2] Shandong Univ, Sch Informat Sci & Engn, Jinan 250100, Shandong, Peoples R China
[3] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Shandong, Peoples R China
[4] Peking Univ, Minist Educ, Key Lab Heavy Ion Phys, Beijing 100871, Peoples R China
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 9A期
关键词：
ion implantation; KTN; planar waveguide; refractive index profile;
D O I：
10.1143/JJAP.46.5885
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Planar optical waveguides in KTaxNb1-xO3 (KTN) crystals were formed by 3.0 MeV C ion implantation with the dose of I X 1015 ions cm(-2) and 500keV proton implantation with the dose of 2 x 1016 ions cm(-2), respectively. The modes in KTN waveguides were measured by a model 2010 prism coupler, four dark modes were observed at 633 nm, while only one mode was observed at 1539nm for the waveguide formed by C ion implantation. Reflectivity calculation method (RCM) was applied to simulate the refractive index profile in waveguides. The SRIM'2006 (the Stopping and Range of Ions in Matter) code was applied for simulating the process of the ion implantation in order to obtain a better understanding for the waveguide formation.
引用
收藏
页码：5885 / 5888
页数：4
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