Dry aerosol jet printing of conductive silver lines on a heated silicon substrate

被引：9

作者：

Efimov, A. A. ^{[1
]}

Arsenov, P. V. ^{[1
]}

Protas, N. V. ^{[1
]}

Minkov, K. N. ^{[2
]}

Urazov, M. N. ^{[1
]}

Ivanov, V. V. ^{[1
]}

机构：

[1] Moscow Inst Phys & Technol, Dept Phys & Quantum Elect, Dolgoprudnyi 141700, Russia

[2] Natl Res Univ Higher Sch Econ, Moscow Inst Elect & Math, Moscow, Russia

来源：

INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND APPLIED COMPOSITE MATERIALS | 2018年 / 307卷

关键词：

D O I：

10.1088/1757-899X/307/1/012082

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A new method for dry aerosol jet printing conductive lines on a heated substrate is presented. The method is based on the use of a spark discharge generator as a source of dry nanoparticles and a heating plate for their sintering. This method allows creating conductive silver lines on a heated silicon substrate up to 300 degrees C without an additional sintering step. It was found that for effective sintering lines of silver nanoparticles the temperature of the heated substrate should be about more than 200-250 degrees C. Average thickness of the sintered silver lines was equal to similar to 20 mu m. Printed lines showed electrical resistivity equal to 35 mu Omega.cm, which is 23 times greater than the resistivity of bulk silver.

引用

页数：4

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