High resolution double-sided diffractive optics for hard X-ray microscopy

被引：31

作者：

Mohacsi, Istvan ^{[1
,2
]}

Vartiainen, Ismo ^{[1
]}

Guizar-Sicairos, Manuel ^{[1
]}

Karvinen, Petri ^{[1
,3
]}

Guzenko, Vitaliy A. ^{[1
]}

Mueller, Elisabeth ^{[1
]}

Farm, Elina ^{[4
]}

Ritala, Mikko

Kewish, Cameron M. ^{[2
]}

Somogyi, Andrea ^{[2
]}

David, Christian ^{[1
]}

机构：

[1] Paul Scherrer Inst, CH-5232 Villigen, Switzerland

[2] Synchrotron SOLEIL, LOrme Merisiers, F-91190 St Aubin, France

[3] Univ Eastern Finland, Inst Photon, FI-80101 Joensuu, Finland

[4] Univ Helsinki, FI-00014 Helsinki, Finland

来源：

OPTICS EXPRESS | 2015年 / 23卷 / 02期

基金：

芬兰科学院;

关键词：

ZONE PLATES; NANOFABRICATION; TRANSMISSION; SCATTERING; LENS;

D O I：

10.1364/OE.23.000776

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The fabrication of high aspect ratio metallic nanostructures is crucial for the production of efficient diffractive X-ray optics in the hard X-ray range. We present a novel method to increase their structure height via the double-sided patterning of the support membrane. In transmission, the two Fresnel zone plates on the two sides of the substrate will act as a single zone plate with added structure height. The presented double-sided zone plates with 30 nm smallest zone width offer up to 9.9% focusing efficiency at 9 keV, that results in a factor of two improvement over their previously demonstrated single-sided counterparts. The increase in efficiency paves the way to speed up X-ray microscopy measurements and allows the more efficient utilization of the flux in full-field X-ray microscopy. (C) 2015 Optical Society of America

引用

页码：776 / 786

页数：11

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