The 2012 Plasma Roadmap

被引:508
作者
Samukawa, Seiji [1 ]
Hori, Masaru [2 ]
Rauf, Shahid [3 ]
Tachibana, Kunihide [4 ]
Bruggeman, Peter [5 ]
Kroesen, Gerrit [5 ]
Whitehead, J. Christopher [6 ]
Murphy, Anthony B. [10 ]
Gutsol, Alexander F. [8 ]
Starikovskaia, Svetlana [9 ]
Kortshagen, Uwe [7 ]
Boeuf, Jean-Pierre [11 ]
Sommerer, Timothy J. [12 ]
Kushner, Mark J. [13 ]
Czarnetzki, Uwe [14 ]
Mason, Nigel [15 ]
机构
[1] Tohoku Univ, Inst Fluid Sci, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Nagoya Univ, Dept Elect Engn & Comp Sci, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[3] Appl Mat Inc, Sunnyvale, CA 94085 USA
[4] Kyoto Univ, Dept Elect Sci & Engn, Nishikyo Ku, Kyoto 6158510, Japan
[5] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands
[6] Univ Manchester, Dept Chem, Manchester M13 9PL, Lancs, England
[7] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA
[8] Chevron Energy Technol Co, Richmond, CA 94802 USA
[9] Ecole Polytech, Plasma Phys Lab, F-91128 Palaiseau, France
[10] CSIRO Mat Sci & Engn, Lindfield, NSW 2070, Australia
[11] Univ Toulouse, Lab Plasma & Convers Energie LAPLACE, Bt 3R2, F-31062 Toulouse 9, France
[12] Gen Elect Res, New York, NY 12309 USA
[13] Univ Michigan, Elect Engn & Comp Sci Dept, Ann Arbor, MI 48109 USA
[14] Ruhr Univ Bochum, Inst Plasma & Atom Phys, D-44780 Bochum, Germany
[15] Open Univ, Dept Phys & Astron, Milton Keynes MK7 6AA, Bucks, England
关键词
INDUCTIVELY-COUPLED PLASMA; LARGE-AREA; LOW-PRESSURE; HYDROGEN-PRODUCTION; NONTHERMAL PLASMA; DISCHARGE; TEMPERATURE; REDUCTION; DAMAGE; OXIDATION;
D O I
10.1088/0022-3727/45/25/253001
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low-temperature plasma physics and technology are diverse and interdisciplinary fields. The plasma parameters can span many orders of magnitude and applications are found in quite different areas of daily life and industrial production. As a consequence, the trends in research, science and technology are difficult to follow and it is not easy to identify the major challenges of the field and their many sub-fields. Even for experts the road to the future is sometimes lost in the mist. Journal of Physics D: Applied Physics is addressing this need for clarity and thus providing guidance to the field by this special Review article, The 2012 Plasma Roadmap. Although roadmaps are common in the microelectronic industry and other fields of research and development, constructing a roadmap for the field of low-temperature plasmas is perhaps a unique undertaking. Realizing the difficulty of this task for any individual, the plasma section of the Journal of Physics D Board decided to meet the challenge of developing a roadmap through an unusual and novel concept. The roadmap was divided into 16 formalized short subsections each addressing a particular key topic. For each topic a renowned expert in the sub-field was invited to express his/her individual visions on the status, current and future challenges, and to identify advances in science and technology required to meet these challenges. Together these contributions form a detailed snapshot of the current state of the art which clearly shows the lifelines of the field and the challenges ahead. Novel technologies, fresh ideas and concepts, and new applications discussed by our authors demonstrate that the road to the future is wide and far reaching. We hope that this special plasma science and technology roadmap will provide guidance for colleagues, funding agencies and government institutions. If successful in doing so, the roadmap will be periodically updated to continue to help in guiding the field.
引用
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页数:37
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