High-order micromechanical electronic filters

被引：46

作者：

Wang, K

Nguyen, CTC

机构：

来源：

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年

关键词：

D O I：

10.1109/MEMSYS.1997.581759

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Third-order, micromechanical bandpass filters comprised of three folded-beam resonators coupled by flexural mode springs are demonstrated using an IC-compatible, polysilicon surface-micromachining technology. The use of quarter-wavelength coupling beams attached to resonators at their folding-trusses is shown to suppress passband distortion due to finite-mass nonidealities, which become increasingly important on this micro-scale. A balanced, 300 kHz, prototype, three-resonator micromechanical filter is demonstrated with filter Q=590 and stopband rejection greater than 38 dB.

引用

页码：25 / 30

页数：6