3D finite element modeling of micromachined pressure sensor

被引：0

作者：

Borovkov, AI ^{[1
]}

Pyatishev, EN ^{[1
]}

Lurie, MS ^{[1
]}

Akulshin, YD ^{[1
]}

Pereyaslavets, EV ^{[1
]}

机构：

[1] St Petersburg State Tech Univ, CAD FEM GmbH Representat CIS, Computat Mech Lab, St Petersburg 195251, Russia

来源：

FOURTH INTERNATIONAL WORKSHOP ON NONDESTRUCTIVE TESTING AND COMPUTER SIMULATIONS IN SCIENCE AND ENGINEERING | 2001年 / 4348卷

关键词：

3D finite element modeling; ANSYS; diaphragm; microsensor; oscillation; pressure; rigid center; sensitivity; stress-strain state;

D O I：

10.1117/12.417671

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

The paper presents 3D finite element (FE) approach to modeling pressure microsensor. It consists of two basic parts. In the first part the 3D finite element modeling itself is presented. The second part of the work deals with the EE structural and modal analysis of different 3D FE models. These researches will allow improve characteristics of the given sensor with the purpose of its further practical application.

引用

页码：338 / 347

页数：10