Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements

被引：45

作者：

Cardin, Julien ^{[1
]}

Leduc, Dominique ^{[2
]}

机构：

[1] ENSICEAN, CNRS, SIFCOM, UMR 6176, F-14050 Caen, France

[2] Univ Nantes, Nantes Atlantique Univ, IREENA, EA1770,Fac Sci & Techn, F-44000 Nantes, France

来源：

APPLIED OPTICS | 2008年 / 47卷 / 07期

关键词：

D O I：

10.1364/AO.47.000894

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a method of analysis of prism-film coupler spectroscopy based on the use of transfer matrix and genetic algorithm, which allows the simultaneous determination of refractive index, thickness, and optical losses of the measured layer. (C) 2008 Optical Society of America.

引用

页码：894 / 900

页数：7

共 32 条

[1]

ABELES F, 1963, PROG OPTICS, V2, P248

[2] MODEL DIELECTRIC-CONSTANTS OF SI AND GE [J].

ADACHI, S .

PHYSICAL REVIEW B, 1988, 38 (18) :12966-12976

[3] RETURN-PATH ELLIPSOMETRY AND A NOVEL NORMAL-INCIDENCE NULL ELLIPSOMETER (NINE) [J].

AZZAM, RMA .

OPTICA ACTA, 1977, 24 (10) :1039-1049

[4]

BASHARA A, 1977, ELLIPSOMETRY POLARIZ

[5] RELATION BETWEEN SURFACE ROUGHNESS AND SPECULAR REFLECTANCE AT NORMAL INCIDENCE [J].

BENNETT, HE ;

PORTEUS, JO .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1961, 51 (02) :123-+

[6] COMPARISON OF THE PROPERTIES OF TITANIUM-DIOXIDE FILMS PREPARED BY VARIOUS TECHNIQUES [J].

BENNETT, JM ;

PELLETIER, E ;

ALBRAND, G ;

BORGOGNO, JP ;

LAZARIDES, B ;

CARNIGLIA, CK ;

SCHMELL, RA ;

ALLEN, TH ;

TUTTLEHART, T ;

GUENTHER, KH ;

SAXER, A .

APPLIED OPTICS, 1989, 28 (16) :3303-3317

[7]

Born M., 1973, Principles of Optics

[8] Optical characterization of PZT thin films for waveguide applications [J].

Cardin, J ;

Leduc, D ;

Schneider, T ;

Lupi, C ;

Averty, D ;

Gundel, HW .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2005, 25 (12) :2913-2916

[9] THIN-FILMS FIELD-TRANSFER MATRIX-THEORY OF PLANAR MULTILAYER WAVEGUIDES AND REFLECTION FROM PRISM-LOADED WAVEGUIDES [J].

CHILWELL, J ;

HODGKINSON, I .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1984, 1 (07) :742-753

[10]

DAVIES H, 1954, P I EL ENG, P209

← 1 2 3 4 →