Nanocontact printing of Au nanoarray onto atomically stepped ultrasmooth polymer sheets

被引：1

作者：

Shimada, Kodai ^{[1
]}

Tan, Goon ^{[1
]}

Nozawa, Yasuhisa ^{[1
]}

Urakami, Tatsuhiro ^{[2
]}

Koyama, Koji ^{[3
]}

Kaneko, Satoru ^{[1
,4
]}

Matsuda, Akifumi ^{[1
]}

Yoshimoto, Mamoru ^{[1
]}

机构：

[1] Tokyo Inst Technol, Dept Mat Sci & Engn, Yokohama, Kanagawa 2268502, Japan

[2] Mitsui Chem Inc, Minato Ku, Tokyo 1238511, Japan

[3] Namiki Precis Jewel Co Ltd, Adachi Ku, Tokyo 1238511, Japan

[4] Kanagawa Ind Technol Ctr, 705-1 Shimoimaizumi, Ebina, Kanagawa 2430435, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 09期

关键词：

NANOIMPRINT LITHOGRAPHY; SOFT LITHOGRAPHY; FABRICATION; SUBSTRATE; PATTERNS; IMPRINT; ARRAYS;

D O I：

10.7567/JJAP.55.098002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Large area Au nanoparticle arrays of dots or meshes were produced onto 0.3-nm-high stepped ultrasmooth poly(methyl methacrylate) (PMMA) sheets by applying a nanocontact-printing technique using a Au-film-coated pillar or mesh molds. The ultrasmooth PMMA sheets were fabricated by thermal nanoimprinting using the atomically stepped sapphire templates. The partial Au ultrathin layer near the protruding area of the mold was adhered onto the PMMA sheet under imprinting conditions (loading of 0.4-2MPa at 80 degrees C for 300 s). (C) 2016 The Japan Society of Applied Physics

引用

页数：3

共 29 条

[1] Atomically stepped glass surface formed by nanoimprint [J].

Akita, Yasuyuki ;

Watanabe, Takahiro ;

Hara, Wakana ;

Matsuda, Akifumi ;

Yoshimoto, Mamoru .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2007, 46 (12-16) :L342-L344

[2] Patterning organic single-crystal transistor arrays [J].

Briseno, Alejandro L. ;

Mannsfeld, Stefan C. B. ;

Ling, Mang M. ;

Liu, Shuhong ;

Tseng, Ricky J. ;

Reese, Colin ;

Roberts, Mark E. ;

Yang, Yang ;

Wudl, Fred ;

Bao, Zhenan .

NATURE, 2006, 444 (7121) :913-917

[3] Imprint lithography with 25-nanometer resolution [J].

Chou, SY ;

Krauss, PR ;

Renstrom, PJ .

SCIENCE, 1996, 272 (5258) :85-87

[4] IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J].

CHOU, SY ;

KRAUSS, PR ;

RENSTROM, PJ .

APPLIED PHYSICS LETTERS, 1995, 67 (21) :3114-3116

[5] Soft UV nanoimprint lithography-designed highly sensitive substrates for SERS detection [J].

Cottat, Maximilien ;

Lidgi-Guigui, Nathalie ;

Tijunelyte, Inga ;

Barbillon, Gregory ;

Hamouda, Frederic ;

Gogol, Philippe ;

Aassime, Abdelhanin ;

Lourtioz, Jean-Michel ;

Bartenlian, Bernard ;

de la Chapelle, Marc Lamy .

NANOSCALE RESEARCH LETTERS, 2014, 9

[6] A new approach to fabricating high density nanoarrays by nanocontact printing [J].

Gu, Jian ;

Xiao, Xiaoyin ;

Takulapalli, Bharath R. ;

Morrison, Michael E. ;

Zhang, Peiming ;

Zenhausern, Frederic .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (06) :1860-1865

[7] Study of the resist deformation in nanoimprint lithography [J].

Hirai, Y ;

Fujiwara, M ;

Okuno, T ;

Tanaka, Y ;

Endo, M ;

Irie, S ;

Nakagawa, K ;

Sasago, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2811-2815

[8] Efficiency enhancement of flexible organic light-emitting devices by using antireflection nanopillars [J].

Ho, Yu-Hsuan ;

Liu, Chung-Chun ;

Liu, Shun-Wei ;

Liang, Hsun ;

Chu, Chih-Wei ;

Wei, Pei-Kuen .

OPTICS EXPRESS, 2011, 19 (10) :A295-A302

[9] Exploitation of localized surface plasmon resonance [J].

Hutter, E ;

Fendler, JH .

ADVANCED MATERIALS, 2004, 16 (19) :1685-1706

[10] Polymer-Coated Gold Island Films as Localized Plasmon Transducers for Gas Sensing [J].

Karakouz, Tanya ;

Vaskevich, Alexander ;

Rubinstein, Israel .

JOURNAL OF PHYSICAL CHEMISTRY B, 2008, 112 (46) :14530-14538

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