共 32 条
[6]
Crowninshield R.D., 1989, U.S., Patent No. [4, 608, 052, 4608052]
[10]
Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2003, 27 (03)
:289-298