Perpendicular magnetic anisotropy of Co\Pt bilayers on ALD HfO2

被引：10

作者：

Vermeulen, Bart F. ^{[1
,2
]}

Wu, Jackson ^{[2
]}

Swerts, Johan ^{[2
]}

Couet, Sebastien ^{[2
]}

Linten, Dimitri ^{[2
]}

Radu, Iuliana P. ^{[2
]}

Temst, Kristiaan ^{[1
]}

Rampelberg, Geert ^{[3
]}

Detavernier, Christophe ^{[3
]}

Groeseneken, Guido ^{[2
,4
]}

Martens, Koen ^{[1
,2
]}

机构：

[1] Katholieke Univ Leuven, Dept Phys & Astron, Leuven, Belgium

[2] IMEC, Kapeldreef 75, Leuven, Belgium

[3] Univ Ghent, Solid State Phys, Ghent, Belgium

[4] Katholieke Univ Leuven, Dept Elect Engn, Leuven, Belgium

来源：

JOURNAL OF APPLIED PHYSICS | 2016年 / 120卷 / 16期

关键词：

COBALT FILMS; THIN-FILMS; MULTILAYERS;

D O I：

10.1063/1.4966121

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Perpendicular Magnetic Anisotropy (PMA) is a key requirement for state of the art Magnetic Random Access Memories (MRAM). Currently, PMA has been widely reported in standard Magnetic Tunnel Junction material stacks using MgO as a dielectric. In this contribution, we present the first report of PMA at the interface with a high-kappa dielectric grown by Atomic Layer Deposition, HfO2. The PMA appears after annealing a HfO2\Co\Pt\Ru stack in N-2 with the K-eff of 0.25 mJ/m(2) as determined by Vibrating Sample Magnetometry. X-Ray Diffraction and Transmission Electron Microscopy show that the appearance of PMA coincides with interdiffusion and the epitaxial ordering of the Co\Pt bilayer. High-kappa dielectrics are especially interesting for Voltage Control of Magnetic Anisotropy applications and are of potential interest for low-power MRAM and spintronics technologies. Published by AIP Publishing.

引用

页数：5

共 44 条

[11] HIGH ANISOTROPY L1(0) THIN-FILMS FOR LONGITUDINAL RECORDING
COFFEY, KR
PARKER, MA
HOWARD, JK
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1995, 31 (06) : 2737 - 2739
[12] de Broeder F. J. A., 1991, J MAGN MAGN MATER, V93, P562
[13] Atomic layer deposition of hafnium oxide on germanium substrates
Delabie, A
Puurunen, RL
Brijs, B
Caymax, M
Conard, T
Onsia, B
Richard, O
Vandervorst, W
Zhao, C
Heyns, MM
Meuris, M
Viitanen, MM
Brongersma, HH
de Ridder, M
Goncharova, LV
Garfunkel, E
Gustafsson, T
Tsai, W
[J]. JOURNAL OF APPLIED PHYSICS, 2005, 97 (06)
[14] Magnetic properties of ultrathin cobalt films on SiO2 substrates
Entani, S
Kiguchi, M
Ikeda, S
Saiki, K
[J]. THIN SOLID FILMS, 2005, 493 (1-2) : 221 - 225
[15] Electric field induced changes in the coercivity of a thin-film ferromagnet
Fowley, C.
Rode, K.
Oguz, K.
Kurt, H.
Coey, J. M. D.
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (30)
[16] Electric Field Induced Magnetic Anisotropy in a Ferromagnet
Gamble, S. J.
Burkhardt, Mark H.
Kashuba, A.
Allenspach, Rolf
Parkin, Stuart S. P.
Siegmann, H. C.
Stoehr, J.
[J]. PHYSICAL REVIEW LETTERS, 2009, 102 (21)
[17] Voltage induced magnetic anisotropy change in ultrathin Fe80Co20/MgO junctions with Brillouin light scattering
Ha, Seung-Seok
Kim, Nam-Hee
Lee, Sukmock
You, Chun-Yeol
Shiota, Yoichi
Maruyama, Takuto
Nozaki, Takayuki
Suzuki, Yoshishige
[J]. APPLIED PHYSICS LETTERS, 2010, 96 (14)
[18] Transport Magnetic Proximity Effects in Platinum
Huang, S. Y.
Fan, X.
Qu, D.
Chen, Y. P.
Wang, W. G.
Wu, J.
Chen, T. Y.
Xiao, J. Q.
Chien, C. L.
[J]. PHYSICAL REVIEW LETTERS, 2012, 109 (10)
[19] Annealing effects on the magnetic dead layer and saturation magnetization in unit structures relevant to a synthetic ferrimagnetic free structure
Jang, Soo Young
You, Chun-Yeol
Lim, S. H.
Lee, S. R.
[J]. JOURNAL OF APPLIED PHYSICS, 2011, 109 (01)
[20] Magnetic anisotropy in metallic multilayers
Johnson, MT
Bloemen, PJH
denBroeder, FJA
deVries, JJ
[J]. REPORTS ON PROGRESS IN PHYSICS, 1996, 59 (11) : 1409 - 1458

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