Variable holographic femtosecond laser processing by use of a spatial light modulator

被引：232

作者：

Hayasaki, Y ^{[1
]}

Sugimoto, T ^{[1
]}

Takita, A ^{[1
]}

Nishida, N ^{[1
]}

机构：

[1] Univ Tokushima, Fac Engn, Dept Opt Sci & Technol, Tokushima 7708506, Japan

来源：

APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 03期

关键词：

D O I：

10.1063/1.1992668

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a holographic femtosecond laser processing system capable of parallel, arbitrary, and variable patterning. These features are achieved by introducing a spatial light modulator displaying a hologram into the femtosecond laser processing system. We demonstrate the variable parallel processing of a glass sample. (c) 2005 American Institute of Physics.

引用

页数：3

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