Structure and mechanical properties of a-C/(AlCrWTaTiNb)CxNy composite films

被引：9

作者：

Lv, C. F. ^{[1
]}

Zhang, G. F. ^{[1
]}

Cao, B. S. ^{[2
]}

He, Y. Y. ^{[2
]}

Hou, X. D. ^{[1
]}

Song, Z. X. ^{[3
]}

机构：

[1] Dalian Univ Technol, Sch Mat Sci & Engn, Key Lab Mat Modificat Laser Ion & Electron Beans, Minist Educ, Dalian 116024, Peoples R China

[2] Dalian Nationalities Univ, Sch Phys & Mat Engn, Dalian 116600, Peoples R China

[3] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Shaanxi, Peoples R China

来源：

SURFACE ENGINEERING | 2016年 / 32卷 / 07期

基金：

中国国家自然科学基金;

关键词：

Multi-component composited film; Microstructure; Mechanical properties; Friction performance; Micro-hardness; Carbon; NITROGEN-CONTENT; SUBSTRATE BIAS; THIN-FILMS; MULTIELEMENT; COATINGS;

D O I：

10.1080/02670844.2015.1130408

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

a-C/(AlCrWTaTiNb) CxNy composite films are deposited by a magnetron sputtering technique using a carbon and mosaic target. The effect of carbon target power on chemical composition, morphology, microstructure and mechanical properties of a-C/(AlCrWTaTiNb) CxNy composite films is investigated. It is found that a multi-element nitride (AlCrWTaTiNb)N-x film prepared without the carbon target demonstrates a triangle shape morphology with two-phase face-centred cubic structure (FCC). The crystallographic structure of the composite films changes into single-phase FCC and the morphology into granular when the carbon target power is in the range of 50-150 W. The preferred orientation of the composited films changes from (220) without the carbon target to (111) introducing carbon atoms. The maximum of micro-hardness and elastic modulus of a-C/(AlCrWTaTiNb) CxNy composite films deposited at 100 W carbon target power are 23 and 290 GPa, respectively. A corresponding H-3/E-2 value reflecting film frictional characteristics also reaches a maximum of 0.147.

引用

页码：541 / 546

页数：6

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