The IMGC calibration set-up for microdisplacement actuators

被引：0
|
作者：
Sacconi, A [1 ]
Picotto, GB [1 ]
Pasin, W [1 ]
机构：
[1] CNR, Ist Metrol G Colonnetti, I-10135 Turin, Italy
来源：
1998 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS DIGEST | 1998年
关键词：
D O I：
10.1109/CPEM.1998.699963
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In the calibration of piezo-capacitive displacement actuators, use is made of an interferometric set-up with sub-nanometric resolution. In order to minimise the periodic non-linearity effect of the interferometer, accurate h-steps are obtained from a computer-based loop control of the out-of-phase between the reference and the measuring signal of the interferometer. Experimental results show a standard uncertainty of about 1 nm + 0.7 . 10(-4) L/mu m.
引用
收藏
页码：385 / 386
页数：2
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