Micro Electric-field Sensors: Principles and Applications

被引:18
作者
Han, Zhifei [1 ]
Xue, Fen [2 ]
Hu, Jun [3 ]
He, Jinliang [4 ]
机构
[1] Tsinghua Univ, Dept Elect Engn, State Key Lab Power Syst, Beijing 100084, Peoples R China
[2] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[3] Tsinghua Univ, Beijing 100084, Peoples R China
[4] Tsinghua Univ, High Voltage & Insulat Technol Res Inst, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
Sensors; Electric fields; Optical interferometry; Optical distortion; Electric variables measurement; Optical fiber sensors; Electrodes; DESIGN;
D O I
10.1109/MIE.2020.3046226
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The measurement of an electric field is of great significance for applications such as online monitoring and fault diagnosis in the ubiquitous power Internet of Things (UPIoT), meteorological monitoring, the petrochemical industry, and space launches. Traditional electric field measurement methods, such as field mills, are bulky, cause electric field distortion, and have a strong temperature dependence. Micro electric field sensors (E-sensors) can effectively reduce the distortion of electric fields. Meanwhile, the low cost and small size allow micro E-sensors to be installed inside equipment, and they are suitable for large-scale sensor array applications. This article introduces E-sensors based on different principles, including the electro-optic effect, induced charge, the inverse piezoelectric effect, and so on. The applications of micro E-sensors and the challenges faced by electric field measurement are also introduced. © 2007-2011 IEEE.
引用
收藏
页码:35 / 42
页数:8
相关论文
共 30 条
[1]   Analysis and design of a micromachined electric-field sensor [J].
Bahreyni, Behraad ;
Wijeweera, Gayan ;
Shafai, Cyrus ;
Rajapakse, Athula .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 17 (01) :31-36
[2]   Micromachined ac/dc electric field sensor with modulated sensitivity [J].
Chen, T. ;
Shafai, C. ;
Rajapakse, A. ;
Liyanage, J. S. H. ;
Neusitzer, T. D. .
SENSORS AND ACTUATORS A-PHYSICAL, 2016, 245 :76-84
[3]  
Chunrong Peng, 2011, Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2011), P417, DOI 10.1109/NEMS.2011.6017381
[4]   Method of inter-turn fault detection for next-generation smart transformers based on deep learning algorithm [J].
Duan, Lian ;
Hu, Jun ;
Zhao, Gen ;
Chen, Kunjin ;
Wang, Shan X. ;
He, Jinliang .
HIGH VOLTAGE, 2019, 4 (04) :282-291
[5]   Internet of Things (IoT): A vision, architectural elements, and future directions [J].
Gubbi, Jayavardhana ;
Buyya, Rajkumar ;
Marusic, Slaven ;
Palaniswami, Marimuthu .
FUTURE GENERATION COMPUTER SYSTEMS-THE INTERNATIONAL JOURNAL OF ESCIENCE, 2013, 29 (07) :1645-1660
[6]   Micro-Cantilever Capacitive Sensor for High-Resolution Measurement of Electric Fields [J].
Han, Zhifei ;
Xue, Fen ;
Yang, Guangzhao ;
Yu, Zhanqing ;
Hu, Jun ;
He, Jinliang .
IEEE SENSORS JOURNAL, 2021, 21 (04) :4317-4324
[7]  
Han ZF, 2019, IEEE SENSOR
[8]   LINEAR 1X2 DIRECTIONAL COUPLER FOR ELECTROMAGNETIC-FIELD DETECTION [J].
HOWERTON, MM ;
BULMER, CH ;
BURNS, WK .
APPLIED PHYSICS LETTERS, 1988, 52 (22) :1850-1852
[9]   The Future Renewable Electric Energy Delivery and Management (FREEDM) System: The Energy Internet [J].
Huang, Alex Q. ;
Crow, Mariesa L. ;
Heydt, Gerald Thomas ;
Zheng, Jim P. ;
Dale, Steiner J. .
PROCEEDINGS OF THE IEEE, 2011, 99 (01) :133-148
[10]   A novel high-sensitivity electrostatic biased electric field sensor [J].
Huang, Jing'ao ;
Wu, Xiaoming ;
Wang, Xiaohong ;
Yan, Xiaojun ;
Lin, Liwei .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (09)