The mechanical properties of DLC and fluorinated DLC films deposited using unbalanced magnetron sputter ion plating method

被引：10
作者：
Choy, KL [1 ]
Zhao, JS [1 ]
机构：
[1] Univ London Imperial Coll Sci Technol & Med, Dept Mat, London SW7 2BP, England
来源：
SCRIPTA MATERIALIA | 1998年 / 39卷 / 07期
关键词：
D O I：
10.1016/S1359-6462(98)00265-6
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
[No abstract available]
引用
收藏
页码：839 / 845
页数：7
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