Chemical sensor as physical sensor:: ISFET-based flow-velocity, flow-direction and diffusion-coefficient sensor

被引：16
|
作者：
Poghossian, A [1 ]
Berndsen, L
Schöning, MJ
机构：
[1] Res Ctr Juelich GMBH, Inst Thin Films & Interfaces, D-52425 Julich, Germany
[2] Univ Appl Sci Aachen, D-52428 Julich, Germany
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 95卷 / 1-3期
关键词：
flow-velocity sensor; flow-direction sensor; diffusion-coefficient sensor; ISFET;
D O I：
10.1016/S0925-4005(03)00444-1
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
An ion-sensitive field-effect transistor (ISFET), which is well known as a (bio-)chemical sensor is utilised for the development of a novel flow-velocity, flow-direction and diffusion-coefficient sensor. The proposed sensor presents a sensor-actuator system and consists of an ion generator and a pH ISFET that detects the in situ electrochemically generated H+- or OH--ions. A good linearity between the measured flow-velocity with the ISFET and the delivered flow rate of the pump was observed. Since the ISFET has a short response time in the millisecond range, it can be utilised as an excellent detector for the measurement of flow-velocity in a wide range. The experimental results of the determination of the flow-direction and diffusion-coefficient of ions with the ISFET are presented, too. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：384 / 390
页数：7
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