Chemical sensor as physical sensor:: ISFET-based flow-velocity, flow-direction and diffusion-coefficient sensor

被引：16

作者：

Poghossian, A ^{[1
]}

Berndsen, L

Schöning, MJ

机构：

[1] Res Ctr Juelich GMBH, Inst Thin Films & Interfaces, D-52425 Julich, Germany

[2] Univ Appl Sci Aachen, D-52428 Julich, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 95卷 / 1-3期

关键词：

flow-velocity sensor; flow-direction sensor; diffusion-coefficient sensor; ISFET;

D O I：

10.1016/S0925-4005(03)00444-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An ion-sensitive field-effect transistor (ISFET), which is well known as a (bio-)chemical sensor is utilised for the development of a novel flow-velocity, flow-direction and diffusion-coefficient sensor. The proposed sensor presents a sensor-actuator system and consists of an ion generator and a pH ISFET that detects the in situ electrochemically generated H+- or OH--ions. A good linearity between the measured flow-velocity with the ISFET and the delivered flow rate of the pump was observed. Since the ISFET has a short response time in the millisecond range, it can be utilised as an excellent detector for the measurement of flow-velocity in a wide range. The experimental results of the determination of the flow-direction and diffusion-coefficient of ions with the ISFET are presented, too. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：384 / 390

页数：7

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