Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

被引：70

作者：

Wang, Zhenyu ^{[1
,2
]}

Zhang, Dong ^{[1
]}

Ke, Peiling ^{[1
]}

Liu, Xincai ^{[2
]}

Wang, Aiying ^{[1
]}

机构：

[1] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China

[2] Ningbo Univ, Fac Mat Sci & Chem Engn, Ningbo 315201, Zhejiang, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY | 2015年 / 31卷 / 01期

基金：

中国国家自然科学基金;

关键词：

TiN; Hybrid HIPIMS; Substrate bias; Microstructure; Mechanical properties; TRIBOLOGICAL BEHAVIORS; MECHANICAL-PROPERTIES; SCRATCH ADHESION; POWER DENSITIES; HARD COATINGS; FILMS; STEEL; DEPOSITION;

D O I：

10.1016/j.jmst.2014.06.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiN coatings were deposited using a hybrid home-made high power impulse magnetron sputtering (HIPIMS) technique at room temperature. The effects of substrate negative bias voltage on the deposition rate, composition, crystal structure, surface morphology, microstructure and mechanical properties were investigated. The results revealed that with the increase in bias voltage from -50 to -400 V, TiN coatings exhibited a trend of densification and the crystal structure gradually evolved from (111) orientation to (200) orientation. The growth rate decreased from about 12.2 nm to 7.8 nm per minute with the coating densification. When the bias voltage was -300 V, the minimum surface roughness value of 10.1 nm was obtained, and the hardness and Young's modulus of TiN coatings reached the maximum value of 17.4 GPa and 263.8 GPa, respectively. Meanwhile, the highest adhesion of 59 N was obtained between coating and substrate.

引用

页码：37 / 42

页数：6

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