Rapid fabrication of microdevices using laser direct writing and replica moulding technique

被引：0

作者：

Antonczak, A. J. ^{[1
]}

Stepak, B. D. ^{[2
]}

Abramski, K. M. ^{[1
]}

机构：

[1] Wroclaw Univ Technol, Fac Elect Engn, Laser & Fibre Elect Grp, Wyb Wyspianskiego 27, PL-50370 Wroclaw, Poland

[2] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, Wyb Wyspianskiego 27, PL-50370 Wroclaw, Poland

来源：

LASER-BASED MICRO AND NANOPROCESSING X | 2016年 / 9736卷

关键词：

microfluidics; Lab On a Chip; laser micromachining; polydimethylsiloxane PDMS; replica moulding;

D O I：

10.1117/12.2218531

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper presents a method that enables fast and low-cost fabrication of microchannels with oval cross-section. The procedure is based on formation of a concave meniscus at the interface between an initially cured PDMS and a polymeric mould fabricated using excimer laser. The replica is formed by expanding gas trapped within the structures of the mould during thermal curing. A second shaping factor is connected with surface phenomena at the interface between the mould, gas and partially cured PDMS. The final shape of the meniscus is determined when the PDMS reaches the high cure extent.

引用

页数：6

共 16 条

[1]

Abdelgawad M, 2011, LAB CHIP, V11, P545, DOI [10.1039/c0lc00093k, 10.1039/c01c00093k]

[2]

Antonczak A.J., 2014, LASER MODIFICATION M, P66

[3] Fabricating small-scale, curved, polymeric structures with convex and concave menisci through interfacial free energy equilibrium [J].

Cheng, Chao-Min ;

Matsuura, Koji ;

Wang, I-Jan ;

Kuroda, Yuka ;

LeDuc, Philip R. ;

Naruse, Keiji .

LAB ON A CHIP, 2009, 9 (22) :3306-3309

[4] Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds [J].

Giang, Ut-Binh T. ;

Lee, Dooyoung ;

King, Michael R. ;

DeLouise, Lisa A. .

LAB ON A CHIP, 2007, 7 (12) :1660-1662

[5] Fabrication of round channels using the surface tension of PDMS and its application to a 3D serpentine mixer [J].

Lee, Kangsun ;

Kim, Choong ;

Shin, Kyeong Sik ;

Lee, JinWoo ;

Ju, Byeong-Kwon ;

Kim, Tae Song ;

Lee, Seung-Ki ;

Kang, Ji Yoon .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (08) :1533-1541

[6] Laser processing for bio-microfluidics applications (part II) [J].

Malek, Chantal G. Khan .

ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2006, 385 (08) :1362-1369

[7] THE PHYSICAL DESCRIPTION OF ELEMENTARY SURFACE PHENOMENA - THERMODYNAMICS VERSUS MECHANICS [J].

PELLICER, J ;

MANZANARES, JA ;

MAFE, S .

AMERICAN JOURNAL OF PHYSICS, 1995, 63 (06) :542-547

[8] A rapid and simple fabrication method for 3-dimensional circular microfluidic channel using metal wire removal process [J].

Song, Suk-Heung ;

Lee, Chang-Keun ;

Kim, Tae-Jin ;

Shin, In-cheol ;

Jun, Seong-Chan ;

Jung, Hyo-Il .

MICROFLUIDICS AND NANOFLUIDICS, 2010, 9 (2-3) :533-540

[9]

Stepak B.D., 1015, J MICROMECH MICROENG, V25, P1

[10] Lab-on-a-chip sample preparation using laminar fluid diffusion interfaces - computational fluid dynamics model results and fluidic verification experiments [J].

Weigl, BH ;

Bardell, RL ;

Kesler, N ;

Morris, CJ .

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 2001, 371 (02) :97-105

← 1 2 →