The effect of the experimental parameters on the growth of MoS2 flakes

Chemical vapor deposition (CVD) is one of the successful methods to synthesize two-dimensional (2D) graphene-like transition metal dichalcogenides (TMDCs) with different morphologies, large size, and high crystal quality, which are beneficial for fundamental research and applications. However, the controllable growth of a 2D molybdenum sulfide (MoS2) monolayer with larger size and high quality is still the challenging issue. In this study, a triangular MoS2 monolayer with a different size and quality has been synthesized under different experimental conditions, including growth temperature, growth time, and precursor weight, by an atmospheric-pressure CVD method. The detailed morphology, size, layer number and optical properties of the as-grown MoS2 flakes have been examined by optical microscopy, X-ray photoelectron spectroscopy, atomic force microscopy, Raman and photoluminescence spectroscopy. The evolution of size and optical performance of the triangular MoS2 flakes has been systematically investigated in terms of the growth parameters.