[1] Southern Univ Sci & Technol, Acad Adv Interdisciplinary Studies, Shenzhen 518055, Peoples R China
[2] Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
[3] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[4] Army Engn Univ PLA, Dept Gen Educ, Nanjing 211101, Peoples R China
[5] Southern Univ Sci & Technol, Sch Microelect, GaN Device Engn Technol Res Ctr Guangdong, Shenzhen 518055, Peoples R China