[1] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[3] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan
[4] Natl Taiwan Univ Sci & Technol, Dept Chem Engn, Taipei 106, Taiwan