A radiofrequency plasma in a polydimethylsiloxane (PDMS) microchip

被引：9

作者：

Lim, HB

Kim, D

Jung, T

Houk, RS

Kim, Y

机构：

[1] Dankook Univ, Dept Chem, Seoul 140714, South Korea

[2] Iowa State Univ, Dept Chem, US Dept Energy, Ames Lab, Ames, IA 50010 USA

[3] Proteonik Inc, Ansan 425170, South Korea

来源：

ANALYTICA CHIMICA ACTA | 2005年 / 545卷 / 02期

关键词：

microchip; RF plasma; emission spectroscopy; optical emission sensor;

D O I：

10.1016/j.aca.2005.04.067

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This is the first report of an analytical plasma in a polymer (polydimethylsiloxane, PDMS) microchip. The plasma channel has dimensions 2 mm diameter x 50 mm long, is operated at atmospheric pressure in Ar, 27.12 MHz and 70 W, and is viewed axially through a purged fiber optic cable. CF4 gas at 0.1 % in argon yields mainly C, emission bands. This PDMS microchip is manufactured easily, inexpensive, and more tolerant to fluorocarbons than microchip plasmas in silica. Based on these initial results, this PDMS microchip plasma could become useful as a sensor for the fluorocarbon gases emitted in semiconductor process or as a gas chromatography (GC) detector for potential application. (c) 2005 Elsevier B.V. All rights reserved.

引用

收藏

页码：119 / 121

页数：3

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