Reduction of oxide layer on various metal surfaces by atomic hydrogen treatment

被引：17

作者：

Izumi, Akira ^{[1
]}

Ueno, Tomoya ^{[1
]}

Miyazaki, Yasuo ^{[1
]}

Oizumi, Hiroaki ^{[1
,2
]}

Nishiyama, Iwao ^{[2
]}

机构：

[1] Kyushu Inst Technol, Fukuoka 8048550, Japan

[2] Assoc Super Adv Elect Technol, Kanagawa 2430198, Japan

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 05期

关键词：

Atomic hydrogen; Cleaning; Hot-wire; Metal oxides; Reduction;

D O I：

10.1016/j.tsf.2007.06.094

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The reduction of various metallic oxides was examined. Atomic hydrogen generated on a heated tungsten catalyzer was used for reduction. It was found that Cu, Ru, Nb, Mo, Rh, Pd, Ir and Pt oxides can be reduced by irradiation with atomic hydrogen. The activation energy for oxide removal was examined and it was found that the values were very small, 10(-2) to 10(-4) eV. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：853 / 855

页数：3

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