Millimeter-wave permittivity measurement of deposited dielectric films using the spherical open resonator

被引:12
作者
Dudorov, SN [1 ]
Lioubtchenko, DV [1 ]
Mallat, JA [1 ]
Räisänen, AV [1 ]
机构
[1] Helsinki Univ Technol, SMARAD, Radio Lab, MilliLab, FI-02015 Helsinki, TKK, Finland
关键词
dielectric constant; millimeter wave; open resonator; thin film;
D O I
10.1109/LMWC.2005.855370
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A differential method using the spherical open resonator is developed for permittivity measurement of a thin dielectric film on an optically dense substrate. It is based on a measurement of the resonant frequency shift due to the thin film on the substrate. The accuracy of the method is demonstrated to be about 4% for a 5.6-mu m photoresist film at 142 GHz.
引用
收藏
页码:564 / 566
页数:3
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