InAlN/GaN HEMTs With AlGaN Back Barriers

被引:151
作者
Lee, Dong Seup [1 ]
Gao, Xiang [2 ]
Guo, Shiping [2 ]
Palacios, Tomas [1 ]
机构
[1] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA
[2] IQE RF LLC, Somerset, NJ 08873 USA
基金
美国国家科学基金会;
关键词
AlGaN back barrier; current gain cutoff frequency (f(T)); drain-induced barrier lowering (DIBL); GaN; high-electron-mobility transistor (HEMT); InAlN; output resistance; CURRENT-DENSITY; TRANSCONDUCTANCE;
D O I
10.1109/LED.2011.2111352
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This letter studies the effect of AlGaN back barriers in the dc and RF performance of In0.17Al0.83N/GaN high-electron mobility transistors grown on SiC substrates. When compared to conventional structures without a back barrier, the back barrier effectively prevents the degradation of drain-induced barrier lowering and significantly improves the output resistance in sub-100-nm-gate-length devices. The reduction in short-channel effects helps to increase the frequency performance of AlGaN back-barrier devices. For a 65-nm gate length, the current gain cutoff frequency (f(T)) of a transistor with an AlGaN back barrier is 210 GHz, which is higher than that of the standard device with the same gate length (f(T) = 195 GHz).
引用
收藏
页码:617 / 619
页数:3
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