Development and Production of Array Barrier Detectors at SCD

被引：26

作者：

Klipstein, P. C. ^{[1
]}

Avnon, E. ^{[1
]}

Benny, Y. ^{[1
]}

Berkowicz, E. ^{[1
]}

Cohen, Y. ^{[1
]}

Dobromislin, R. ^{[1
]}

Fraenkel, R. ^{[1
]}

Gershon, G. ^{[1
]}

Glozman, A. ^{[1
]}

Hojman, E. ^{[1
]}

Ilan, E. ^{[1
]}

Karni, Y. ^{[1
]}

Klin, O. ^{[1
]}

Kodriano, Y. ^{[1
]}

Krasovitsky, L. ^{[1
]}

Langof, L. ^{[1
]}

Lukomsky, I. ^{[1
]}

Nevo, I. ^{[1
]}

Nitzani, M. ^{[1
]}

Pivnik, I. ^{[1
]}

Rappaport, N. ^{[1
]}

Rosenberg, O. ^{[1
]}

Shtrichman, I. ^{[1
]}

Shkedy, L. ^{[1
]}

Snapi, N. ^{[1
]}

Talmor, R. ^{[1
]}

Tessler, R. ^{[1
]}

Weiss, E. ^{[1
]}

Tuito, A. ^{[2
]}

机构：

[1] Semicond Devices, POB 2250, IL-31021 Haifa, Israel

[2] Israel MOD, Tel Aviv, Israel

来源：

JOURNAL OF ELECTRONIC MATERIALS | 2017年 / 46卷 / 09期

关键词：

Infrared detector; barrier detector; XBn; XBp; megapixel; MWIR; LWIR; type II superlattice;

D O I：

10.1007/s11664-017-5590-x

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

XBn or XBp barrier detectors exhibit diffusion-limited dark currents comparable with mercury cadmium telluride Rule-07 and high quantum efficiencies. In 2011, SemiConductor Devices (SCD) introduced "HOT Pelican D", a 640 x 512/15-mu m pitch InAsSb/AlSbAs XBn mid-wave infrared (MWIR) detector with a 4.2-mu m cut-off and an operating temperature of similar to 150 K. Its low power (similar to 3 W), high pixel operability (> 99.5%) and long mean time to failure make HOT Pelican D a highly reliable integrated detector-cooler product with a low size, weight and power. More recently, "HOT Hercules" was launched with a 1280 x 1024/15-mu m format and similar advantages. A 3-megapixel, 10-mu m pitch version ("HOT Blackbird") is currently completing development. For long-wave infrared applications, SCD's 640 x 512/15-mu m pitch "Pelican-D LW" XBp type II superlattice (T2SL) detector has a similar to 9.3-mu m cut-off wavelength. The detector contains InAs/GaSb and InAs/AlSb T2SLs, and is fabricated into focal plane array (FPA) detectors using standard production processes including hybridization to a digital silicon read-out integrated circuit (ROIC), glue underfill and substrate thinning. The ROIC has been designed so that the complete detector closely follows the interfaces of SCD's MWIR Pelican-D detector family. The Pelican-D LW FPA has a quantum efficiency of similar to 50%, and operates at 77 K with a pixel operability of > 99% and noise equivalent temperature difference of 13 mK at 30 Hz and F/2.7.

引用

页码：5386 / 5393

页数：8

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