Microfabrication of Silicon Hydrogenated Thin Targets for Multi-MeV Laser-Driven Proton Acceleration

被引:21
作者
Picciotto, Antonino [1 ]
Margarone, Daniele [2 ]
Crivellari, Michele [1 ]
Bellutti, Pierluigi [1 ]
Colpo, Sabrina [3 ]
Torrisi, Lorenzo [4 ,5 ]
Krasa, Josef [2 ]
Velhyan, Andriy [2 ]
Ullschmied, Jiri [2 ]
机构
[1] Fdn Bruno Kessler, Microtechnol Lab, I-38123 Povo, Trento, Italy
[2] ASCR PALS Ctr, Inst Phys, Prague 18221 8, Czech Republic
[3] Fdn Bruno Kessler, MEMS Reaserch Unit, I-38123 Povo, Trento, Italy
[4] Univ Messina, Dept Phys, Ctr Papardo Sperone, I-98166 Messina, Italy
[5] INFN LNS, I-95125 Catania, Italy
关键词
SINGLE-CRYSTAL SILICON; ION GENERATION; SOLID TARGETS; DIFFUSION; BEAMS; IRRADIATION; PLASMA;
D O I
10.1143/APEX.4.126401
中图分类号
O59 [应用物理学];
学科分类号
摘要
An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H-2 environment during an annealing process at 420 degrees C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100 mA at 1 m from the source) and multi-MeV proton beams. (C) 2011 The Japan Society of Applied Physics
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页数:3
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