Numerical studies of flow patterns during Czochralski growth of square-shaped Si crystals

被引：9

作者：

Miller, W. ^{[1
]}

Frank-Rotsch, Ch. ^{[1
]}

Rudolph, P. ^{[1
]}

机构：

[1] Leibniz Inst Crystal Growth IKZ, D-12489 Berlin, Germany

来源：

JOURNAL OF CRYSTAL GROWTH | 2011年 / 318卷 / 01期

关键词：

Computer simulation; Fluid flows; Magnetic field assisted Czochralski method; CONVECTION; MELT;

D O I：

10.1016/j.jcrysgro.2010.10.098

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We have performed 3D calculations of the melt flow during Czochralski growth of nearly square-shaped silicon crystals by means of Ansys-cfx. Beforehand, the temperature field in the furnace has been computed by axisymmetric computations using CrysMAS for providing thermal boundary conditions for the local simulation of the melt flow. CrysMAS has been also used for the computations of Lorentz force densities, produced by a travelling magnetic field using the KRISTMAG (R) approach. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：244 / 248

页数：5

共 7 条

[1] Numerical study of 3D unsteady melt convection during indu strial-scale CZ Si-crystal growth [J].