Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator

被引：345

作者：

Claes, Tom ^{[1
]}

Girones Molera, Jordi ^{[2
]}

De Vos, Katrien ^{[1
]}

Schacht, Etienne ^{[2
]}

Baets, Roel ^{[1
]}

Bienstman, Peter ^{[1
]}

机构：

[1] Univ Ghent, IMEC, Dept Informat Technol, Photon Res Grp, B-9000 Ghent, Belgium

[2] Univ Ghent, Dept Organ Chem, Polymer Chem & Biomat Res Grp, B-9000 Ghent, Belgium

来源：

IEEE PHOTONICS JOURNAL | 2009年 / 1卷 / 03期

关键词：

Biosensor; ring resonator; silicon on insulator; slot waveguide; MICRORING RESONATOR; REFRACTIVE-INDEX; SENSOR;

D O I：

10.1109/JPHOT.2009.2031596

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 mu m x 10 mu m, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4: 2 . 10(-5) RIU for changes in the refractive index of the top cladding. We prove for the first time that surface chemistry for selective label-free sensing of proteins can be applied inside a 100 nm-wide slot region and demonstrate that the application of a slot waveguide instead of a normal waveguide increases the sensitivity of an SOI ring resonator with a factor 3.5 for the detection of proteins.

引用

页码：197 / 204

页数：8

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