Precise MEMS gyroscope with ladder structure

被引：0

作者：

Mochida, Yoichi ^{[1
]}

Kato, Yoshitaka ^{[2
]}

Konaka, Yoshihiro ^{[1
]}

Mori, Akira ^{[2
]}

Kobayashi, Masato ^{[2
]}

Kobayashi, Shinji ^{[1
]}

机构：

[1] Murata Mfg Co Ltd, Kyoto, Japan

[2] Kanazawa Murata Mfg Co Ltd, Ishikawa, Japan

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

gyroscope; acceleration sensitivity; temperature dependence;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a precise MEMS gyroscope with a 'ladder structure', which was designed to reduce acceleration sensitivity, temperature dependence of sensitivity, and offset drift. This gyroscope has four masses linked by two parallel straight beams, and each mass oscillates in opposite directions in a driving mode. A sensor module using the fabricated gyroscope shows low acceleration sensitivity and stable characteristics in the presence of temperature changes. This gyroscope will be useful for car navigation systems, for example, where high precision is necessary.

引用

页数：2

共 7 条

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[3]

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[4]

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[5]

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[6]

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[7] A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes [J].

Mochida, Y ;

Tamura, M ;

Ohwada, K .

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :618-623

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