Integrating vertically aligned carbon nanotubes on micromechanical structures

被引：6
作者：
Teh, WH
Smith, CG
Teo, KBK
Lacerda, RG
Amaratunga, GAJ
Milne, WI
Castignolles, M
Loiseau, A
机构：
[1] Univ Cambridge, Cavendish Lab, Cambridge CB3 0HE, England
[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
[3] Off Natl Etud & Rech Aerosp, CNRS, LEM, F-92322 Chatillon, France
[4] Cavendish Kinet Ltd, NL-5223 LA sHertogenbosch, Netherlands
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 04期
关键词：
D O I：
10.1116/1.1591743
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present preliminary results on a microfabrication approach to enable the integration of high yield, uniform, and preferential growth of vertically aligned carbon nanotubes (VACNTs) on low-stress micromechanical. structures using a combination of "electron-beam crosslinked" poly (methylmethacrylate) surface nanomachining and direct current plasma enhanced chemical vapor deposition of electric-field-aligned carbon nanotubes. In this article, selective placement of high yield and uniform VACNTs on a partially suspended Ni/SiO2/Ti microstructure has been demonstrated. (C) 2003 American Vacuum Society.
引用
收藏
页码：1380 / 1383
页数：4
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