共 39 条
- [21] Impact of Line and Via Resistance on Device Performance at the 5nm Gate All Around Node and Beyond2018 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC), 2018, : 70 - 72Lanzillo, Nicholas A.论文数: 0 引用数: 0 h-index: 0机构: IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAMotoyama, Koichi论文数: 0 引用数: 0 h-index: 0机构: IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAHook, Terence论文数: 0 引用数: 0 h-index: 0机构: IBM Syst & Technol, Burlington, VT 05452 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAClevenger, Larry论文数: 0 引用数: 0 h-index: 0机构: IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA
- [22] Design of a high performance CNFET 10T SRAM cell at 5nm technology nodeIEICE ELECTRONICS EXPRESS, 2023, 20 (12):Yang, Zihao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Beijing 100049, Peoples R China Beijing Key Lab Three Dimens & Nanometer Integrate, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R ChinaYin, Minghui论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Beijing 100049, Peoples R China Beijing Key Lab Three Dimens & Nanometer Integrate, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R ChinaYou, Yunxia论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Beijing 100049, Peoples R China Beijing Key Lab Three Dimens & Nanometer Integrate, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R ChinaLi, Zhiqiang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Beijing 100049, Peoples R China Beijing Key Lab Three Dimens & Nanometer Integrate, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R ChinaLiu, Xin论文数: 0 引用数: 0 h-index: 0机构: Univ Chinese Acad Sci, Beijing 100049, Peoples R China Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R ChinaZhang, Weihua论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Beijing 100049, Peoples R China Beijing Key Lab Three Dimens & Nanometer Integrate, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, EDA Ctr, Beijing 100029, Peoples R China
- [23] CMOS Scaling for the 5 nm Node and Beyond: Device, Process and TechnologyNANOMATERIALS, 2024, 14 (10)Radamson, Henry H.论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaMiao, Yuanhao论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaZhou, Ziwei论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaWu, Zhenhua论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaKong, Zhenzhen论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaGao, Jianfeng论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaYang, Hong论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaRen, Yuhui论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaZhang, Yongkui论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaShi, Jiangliu论文数: 0 引用数: 0 h-index: 0机构: Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaXiang, Jinjuan论文数: 0 引用数: 0 h-index: 0机构: Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaCui, Hushan论文数: 0 引用数: 0 h-index: 0机构: Jiangsu Leuven Instruments Co Ltd, Xuzhou 221300, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaLu, Bin论文数: 0 引用数: 0 h-index: 0机构: Shanxi Normal Univ, Sch Phys & Informat Engn, Linfen 041004, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaLi, Junjie论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaLiu, Jinbiao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaLin, Hongxiao论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaXu, Haoqing论文数: 0 引用数: 0 h-index: 0机构: Univ Chinese Acad Sci, Inst Microelect, Beijing 100049, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaLi, Mengfan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Inst Microelect, Beijing 100049, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaCao, Jiaji论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaHe, Chuangqi论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaDuan, Xiangyan论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaZhao, Xuewei论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Univ Chinese Acad Sci, Inst Microelect, Beijing 100049, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaSu, Jiale论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaDu, Yong论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaYu, Jiahan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaWu, Yuanyuan论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaJiang, Miao论文数: 0 引用数: 0 h-index: 0机构: Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaLiang, Di论文数: 0 引用数: 0 h-index: 0机构: Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaLi, Ben论文数: 0 引用数: 0 h-index: 0机构: Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaDong, Yan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Inst Microelect, Beijing 100029, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R ChinaWang, Guilei论文数: 0 引用数: 0 h-index: 0机构: Beijing Superstring Acad Memory Technol, Beijing 100176, Peoples R China Univ Sci & Technol China, Hefei Natl Lab, Hefei 230088, Peoples R China Guangdong Greater Bay Area Inst Integrated Circuit, Res & Dev Ctr Optoelect Hybrid IC, Guangzhou 510535, Peoples R China
- [24] High-density SOT-MRAM technology and design specifications for the embedded domain at 5nm node2020 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2020,Gupta, M.论文数: 0 引用数: 0 h-index: 0机构: IMEC, Leuven, Belgium IMEC, Leuven, BelgiumPerumkunnil, M.论文数: 0 引用数: 0 h-index: 0机构: IMEC, Leuven, Belgium IMEC, Leuven, BelgiumGarello, K.论文数: 0 引用数: 0 h-index: 0机构: IMEC, Leuven, Belgium Spintec, Grenoble, France IMEC, Leuven, BelgiumRao, S.论文数: 0 引用数: 0 h-index: 0机构: IMEC, Leuven, Belgium IMEC, Leuven, BelgiumYasin, F.论文数: 0 引用数: 0 h-index: 0机构: IMEC, Leuven, Belgium IMEC, Leuven, BelgiumKar, G. S.论文数: 0 引用数: 0 h-index: 0机构: IMEC, Leuven, Belgium IMEC, Leuven, BelgiumFurnemont, A.论文数: 0 引用数: 0 h-index: 0机构: IMEC, Leuven, Belgium IMEC, Leuven, Belgium
- [25] Modeling EUVL Patterning Variability for Metal Layers in 5nm Technology Node and Its Effect on Electrical ResistanceEXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VIII, 2017, 10143Gao, Weimin论文数: 0 引用数: 0 h-index: 0机构: Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, Belgium IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumBlanco, Victor论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumPhilipsen, Vicky论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumKamohara, Itaru论文数: 0 引用数: 0 h-index: 0机构: Synopsys GmbH, Karl Hammerschmidt Str 34, D-85609 Aschheim Dornach, Germany Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumSaad, Yves论文数: 0 引用数: 0 h-index: 0机构: Synopsys LLC, Thurgauerstr 40,Airgate Bldg, CH-8050 Zurich, Switzerland Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumCiofi, Ivan论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumMelvin, Lawrence S., III论文数: 0 引用数: 0 h-index: 0机构: Synopsys Inc, 2025 NW Cornelius Pass Rd, Hillsboro, OR 97124 USA Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumHendrickx, Eric论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumWiaux, Vincent论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, BelgiumKim, Ryoung Han论文数: 0 引用数: 0 h-index: 0机构: IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Synopsys Inc, Technol Laan 11-0002, B-3001 Leuven, Belgium
- [26] Yield enhancement methodologies for 90nm technology and beyond - art. no. 615208Metrology, Inspection, and Process Control for Microlithography XX, Pts 1 and 2, 2006, 6152 : 15208 - 15208Allgair, John论文数: 0 引用数: 0 h-index: 0Carey, Todd论文数: 0 引用数: 0 h-index: 0Dougan, James论文数: 0 引用数: 0 h-index: 0Etnyre, Tony论文数: 0 引用数: 0 h-index: 0Langdon, Nate论文数: 0 引用数: 0 h-index: 0Murray, Brooke论文数: 0 引用数: 0 h-index: 0
- [27] TCAD based performance analysis of junctionless cylindrical double gate all around FET up to 5nm technology node2017 20TH INTERNATIONAL CONFERENCE OF COMPUTER AND INFORMATION TECHNOLOGY (ICCIT), 2017,Hossain, N. M. Mahmud论文数: 0 引用数: 0 h-index: 0机构: United Int Univ, Dept Elect & Elect Engn, Dhaka, Bangladesh United Int Univ, Dept Elect & Elect Engn, Dhaka, BangladeshQuader, Sakib论文数: 0 引用数: 0 h-index: 0机构: United Int Univ, Dept Elect & Elect Engn, Dhaka, Bangladesh United Int Univ, Dept Elect & Elect Engn, Dhaka, Bangladesh论文数: 引用数: h-index:机构:Chowdhury, Md. Iqbal Bahar论文数: 0 引用数: 0 h-index: 0机构: United Int Univ, Dept Elect & Elect Engn, Dhaka, Bangladesh United Int Univ, Dept Elect & Elect Engn, Dhaka, Bangladesh
- [28] Novel Solutions to Enable Contact Resistivity <1E-9 Ω-cm2 for 5nm Node and Beyond2018 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA), 2018,Hung, Raymond论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAKhaja, Fareen Adeni论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAHollar, Kelly E.论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USARao, K. V.论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAMunnangi, Samuel论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAChen, Yongmei论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAOkazaki, Motoya论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAHuang, Yi-Chiau论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USALi, Xuebin论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAChung, Hua论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAChan, Osbert论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USALazik, Christopher论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAJin, Miao论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAZhou, Hongwen论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAMayur, Abhilash论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAKim, Namsung论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USAYieh, Ellie论文数: 0 引用数: 0 h-index: 0机构: Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA Appl Mat 3050 Bowers Ave, Santa Clara, CA 95053 USA
- [29] Yield prediction techniques based on DFM rules and criticality for 65nm technology and beyondISSM 2007: 2007 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, CONFERENCE PROCEEDINGS, 2007, : 128 - 131Kojima, Tsutomu论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, JapanKyou, S.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, JapanMurakami, H.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, JapanHonda, K.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, JapanNakayama, T.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, JapanMatsuoka, F.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, Japan Toshiba Co Ltd, Semicond Co, Syst LSI Div, Isogo Ku, Yokohama, Kanagawa 2358522, Japan
- [30] Multiphonon-Electron Coupling Enhanced Defect Generation and Breakdown Mechanism in MOL New Spacer Dielectrics for 7nm/5nm Technology Nodes and Beyond2020 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2020,Wu, Ernest论文数: 0 引用数: 0 h-index: 0机构: Ibm Res Div, Essex Jct, VT 05452 USA Ibm Res Div, Essex Jct, VT 05452 USASouthwick, Richard, III论文数: 0 引用数: 0 h-index: 0机构: Ibm Res Div, Albany, NY USA Ibm Res Div, Essex Jct, VT 05452 USAMehta, Sanjay论文数: 0 引用数: 0 h-index: 0机构: Ibm Res Div, Albany, NY USA Ibm Res Div, Essex Jct, VT 05452 USALi, Baozhen论文数: 0 引用数: 0 h-index: 0机构: Ibm Res Div, Essex Jct, VT 05452 USA Ibm Res Div, Essex Jct, VT 05452 USAWang, Miaomiao论文数: 0 引用数: 0 h-index: 0机构: Ibm Res Div, Albany, NY USA Ibm Res Div, Essex Jct, VT 05452 USA