Frequency Analysis of Electrostatic Cantilever-based MEMS Sensor

被引：0

作者：

Shoaib, Muhammad ^{[1
]}

Hisham, Nor ^{[1
]}

Basheer, Noohul ^{[1
]}

Tariq, Mohammad ^{[1
]}

机构：

[1] Univ Teknol PETRONAS, Dept Elect & Elect Engn, Tronoh 31750, Perak, Malaysia

来源：

2015 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2015年

关键词：

MEMS; cantilever; analytical model; frequency shift; Simulink; COMSOL; MICROBEAM; MODEL;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium. In the modeling, electrostatic force is coupled with the bending moment of cantilever to produce actuation at a resonance frequency. Mass of blood cells is used as an external load on the cantilever which results in shift in resonance frequency. This shift due to additional mass is sensed by the piezoresistive mechanism. The device analytical model is integrated using Simulink tool to study the dynamic behavior. The same device is then designed using COMSOL tool and FEM analysis is performed. The analytical results are compared with the simulated results.

引用

页数：6

共 50 条

[31] Analytical modeling for determination of pull-in voltage for an electrostatic actuated MEMS cantilever beam
Wei, LC
Mohammad, AB
Kassim, NM
2002 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2002, : 233 - 238
[32] DNA hybridization detected by cantilever-based sensor with integrated piezoresistive read-out
Marie, R
Thaysen, J
Christensen, CBV
Boisen, A
Micro Total Analysis Systems 2004, Vol 2, 2005, (297): : 485 - 487
[33] Graphene cantilever-based digital logic gates
Prasantha R. Mudimela
Rekha Chaudhary
Journal of Computational Electronics, 2021, 20 : 81 - 87
[34] Developing MEMS DC Electric Current Sensor for End-use Monitoring of DC Power Supply: Part IV - Cantilever-based Magnetic Field Sensor Device
Terasawa, Daisuke
Wang, Dong F.
Kizaki, Takahiro
Itoh, Toshihiro
Maeda, Ryutaro
2014 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2014, : 180 - 183
[35] A cantilever-based structure for surface features characterization
Xia, Cao
Wang, Dong F.
Du, Xu
Zheng, Guowen
Feng, Haonan
An, Linjun
Mao, Mengyuan
Liu, Xin
2018 13TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS 2018), 2018, : 221 - 224
[36] The application of a cantilever-based strain sensor to air pressure measurement in air blowing process
Iwamatsu S.
Tada S.
Konno S.
Abe Y.
Yahagi T.
Katoh M.
Iwamatsu, Shinnosuke (iwamatsush@pref.yamagata.jp), 1600, Institute of Electrical Engineers of Japan (137): : 84 - 88
[37] A cantilever-based resonator for reconfigurable nanomechanical computing
Fang, Jiawei
Zhang, Pengcheng
Yang, Rui
Wang, Zenghui
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021, 31 (12)
[38] Graphene cantilever-based digital logic gates
Mudimela, Prasantha R.
Chaudhary, Rekha
JOURNAL OF COMPUTATIONAL ELECTRONICS, 2021, 20 (01) : 81 - 87
[39] Modelling cantilever-based force spectroscopy with polymers
Kühner, F
Gaub, HE
POLYMER, 2006, 47 (07) : 2555 - 2563
[40] Optimization of On-chip Interface Circuit for MEMS Sensor based on Micro-cantilever
Bais, Badariah
Loh, Liang Wen
Rahim, Rosminazuin Ab.
Majli, Burhanuddin Yeop
NEMS/MEMS TECHNOLOGY AND DEVICES, 2011, 254 : 13 - 16

← 1 2 3 4 5 →