Laser processing of metal thin films using transparent microsphere arrays

被引:13
作者
Constantinescu, C. [1 ]
Kallepalli, L. N. D. [1 ]
Delaporte, P. [1 ]
Uteza, O. [1 ]
Grojo, D. [1 ]
机构
[1] Aix Marseille Univ, CNRS, Lab LP3, UMR 7341, F-13288 Marseille, France
关键词
LIFT; Laser printing; Dewetting; Nano-pinhole; Microlens; Langmuir-Blodgett; NANOSPHERE LITHOGRAPHY; COLLOIDAL LITHOGRAPHY; FABRICATION; SUBSTRATE; CRYSTALS;
D O I
10.1016/j.apsusc.2014.10.003
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We present results on a microsphere-assisted laser processing method that allows the parallel ablation and printing of metal, leading to the formation of negative patterning (nanopinholes) and positive patterning (nanodroplets). High density packed monolayers of transparent microspheres on quartz substrates are covered with thermally evaporated silver films of controlled thickness. When back-illuminated using picosecond laser pulses, the laser interaction with the microsphere near-field mask produces periodic local detachments of the films that can be collected on a receiving substrate. We report on the resulting metal nanostructures, as our experiments lead to well-defined nanohole arrays with characteristics that can be controlled with the type of spheres and the laser energy. We characterize the ablated narrow-size-distribution nanodroplets that are randomly distributed on a receiving surface, as these aspects reveal some of the challenges associated to downscaling to the nanometer scale of laser printing techniques. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:112 / 117
页数:6
相关论文
共 43 条
[1]  
ALFREY T, 1954, J OPT SOC AM, V44, P603
[2]  
[Anonymous], 2009, HDB SURFACE COLLOID
[3]   Role of the Meniscus Shape in Large-Area Convective Particle Assembly [J].
Born, Philip ;
Blum, Susanne ;
Munoz, Andres ;
Kraus, Tobias .
LANGMUIR, 2011, 27 (14) :8621-8633
[4]   Colloidal lithography for fabricating patterned polymer-brush microstructures [J].
Chen, Tao ;
Chang, Debby P. ;
Jordan, Rainer ;
Zauscher, Stefan .
BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2012, 3 :397-403
[5]  
Constantinescu C., 2014, ARRAYS METALLI UNPUB
[6]   Periodically structured Silicon substrate by microsphere-assisted laser interactions [J].
Deepak, K. L. N. ;
Grojo, D. ;
Charmasson, L. ;
Delaporte, P. ;
Uteza, O. .
LASER-BASED MICRO- AND NANOPACKAGING AND ASSEMBLY VII, 2013, 8608
[7]  
Deepak K. L. N., 2012, UVX, V2013, P02003
[8]   Applications of laser printing for organic electronics [J].
Delaporte, Ph. ;
Ainsebaa, A. ;
Alloncle, A. -P. ;
Benetti, M. ;
Boutopoulos, C. ;
Cannata, D. ;
Di Pietrantonio, F. ;
Dinca, V. ;
Dinescu, M. ;
Dutroncy, J. ;
Eason, R. W. ;
Feinaugle, M. ;
Fernandez-Pradas, J. -M. ;
Grisel, A. ;
Kaur, K. ;
Lehmann, U. ;
Lippert, T. ;
Loussert, C. ;
Makrygianni, M. ;
Manfredonia, I. ;
Mattle, T. ;
Morenza, J. -L. ;
Nagel, M. ;
Nueesch, F. ;
Palla-Papavlu, A. ;
Rapp, L. ;
Rizvi, N. ;
Rodio, G. ;
Sanaur, S. ;
Serra, P. ;
Shaw-Stewart, J. ;
Sones, C. L. ;
Verona, E. ;
Zergioti, I. .
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XVIII, 2013, 8607
[9]   2-DIMENSIONAL CRYSTALLIZATION [J].
DENKOV, ND ;
VELEV, OD ;
KRALCHEVSKY, PA ;
IVANOV, IB ;
YOSHIMURA, H ;
NAGAYAMA, K .
NATURE, 1993, 361 (6407) :26-26
[10]   MECHANISM OF FORMATION OF 2-DIMENSIONAL CRYSTALS FROM LATEX-PARTICLES ON SUBSTRATES [J].
DENKOV, ND ;
VELEV, OD ;
KRALCHEVSKY, PA ;
IVANOV, IB ;
YOSHIMURA, H ;
NAGAYAMA, K .
LANGMUIR, 1992, 8 (12) :3183-3190