Characterization of a novel hybrid silicon three-axial force sensor

被引：68
作者：
Valdastri, P
Roccella, S
Beccai, L
Cattin, E
Menciassi, A
Carrozza, MC
Dario, P
机构：
[1] Scuola Super Sant Anna, Polo St Anna Valdera, CRIM, I-56025 Pontedera, PI, Italy
[2] Scuola Super Sant Anna, Polo St Anna Valdera, ARTS Lab, I-56025 Pontedera, PI, Italy
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 123-24卷
关键词：
three-axial force sensor; hybrid; characterization; MEMS-based;
D O I：
10.1016/j.sna.2005.01.006
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A three-axial silicon based force sensor with a volume less than 7 mm(3), developed for biomechanical measurements, has been characterized. Results obtained with two different experimental test benches are reported in this paper. High linearity and low hysteresis during sensor normal loading have been obtained by using a preliminary test bench. A second improved test bench, based on a six-components load cell, has been employed to perform a reliable sensor calibration. A sensitivity matrix has been evaluated from experimental data and an estimation of force accuracy has been determined. The experimental sensitivity in the shear directions is 0.054 N-1 and in the normal direction is 0.026 N-1. A method for comparing the device characteristics with similar state of the art three-axial force sensors has been provided. (C) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：249 / 257
页数：9
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